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Microtags with 150-nm line gratings fabricated by use of extreme-ultraviolet lithography

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Abstract

The microtag concept is an anticounterfeiting and security measure. Microtags are computer-generated holograms (CGH’s) consisting of 150-nm lines arranged to form 300-nm-period gratings. The microtags that we describe were designed for readout at 442 nm. The smallest microtag measures 56 µm×80 µm when viewed at normal incidence. The CGH design process uses a modified iterative Fourier-transform algorithm to create either phase-only or phase-and-amplitude microtags. We also report on a simple and compact readout system for recording the diffraction pattern formed by a microtag. The measured diffraction patterns agree very well with predictions.

© 1998 Optical Society of America

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