Abstract

An aluminum wire-grid polarizer whose period is 0.39 µm has been fabricated on a quartz substrate by electron-beam direct-writing lithography and the lift-off method. By using the s -polarization resonance effect and optimizing structural parameters, characteristics such as a loss of less than 20% and an extinction ratio larger than 1000 have been experimentally obtained at the 0.8- µm -wavelength band. Theoretical analysis is performed and found to be consistent with the experimental results.

© 1997 Optical Society of America

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  1. J. P. Auton, Appl. Opt. 31, 1023 (1967).
  2. For example, see M. Koeda and M. Kawata, Shimazu Hyoron 48, 393 (1992). (in Japanese)
  3. B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).
  4. H. Lochbihler and R. Depine, J. Modern Opt. 40, 1273 (1993).
  5. H. Lochbihler, E. Polnau, and P. Predehl, Appl. Opt. 34, 5725 (1995).
  6. H. Lochbihler, J. Mod. Opt. 43, 1867 (1996).
  7. M. Neviere, in Electromagnetic Theory and Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 5.
  8. D. Maystre, in Electromagnetic Surface Modes, A. D. Boarman, ed. (Wiley, New York, 1982), Chap. 17.
  9. T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1985).

1995

1994

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

1993

H. Lochbihler and R. Depine, J. Modern Opt. 40, 1273 (1993).

1992

For example, see M. Koeda and M. Kawata, Shimazu Hyoron 48, 393 (1992). (in Japanese)

1985

T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1985).

1982

D. Maystre, in Electromagnetic Surface Modes, A. D. Boarman, ed. (Wiley, New York, 1982), Chap. 17.

1980

M. Neviere, in Electromagnetic Theory and Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 5.

1967

J. P. Auton, Appl. Opt. 31, 1023 (1967).

Abraham, M.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Auton, J. P.

J. P. Auton, Appl. Opt. 31, 1023 (1967).

Depine, R.

H. Lochbihler and R. Depine, J. Modern Opt. 40, 1273 (1993).

Ehrfeld, W.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Gale, M. T.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Gaylord, T. K.

T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1985).

Hintermaier, M.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Kawata, M.

For example, see M. Koeda and M. Kawata, Shimazu Hyoron 48, 393 (1992). (in Japanese)

Knapek, E.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Koeda, M.

For example, see M. Koeda and M. Kawata, Shimazu Hyoron 48, 393 (1992). (in Japanese)

Lochbihler, H.

H. Lochbihler, E. Polnau, and P. Predehl, Appl. Opt. 34, 5725 (1995).

H. Lochbihler and R. Depine, J. Modern Opt. 40, 1273 (1993).

H. Lochbihler, J. Mod. Opt. 43, 1867 (1996).

Maystre, D.

D. Maystre, in Electromagnetic Surface Modes, A. D. Boarman, ed. (Wiley, New York, 1982), Chap. 17.

Moharam, M. G.

T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1985).

Morf, R.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Neviere, M.

M. Neviere, in Electromagnetic Theory and Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 5.

Polnau, E.

Predehl, P.

Stenkamp, B.

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Appl. Opt.

J. Mod. Opt.

H. Lochbihler, J. Mod. Opt. 43, 1867 (1996).

J. Modern Opt.

H. Lochbihler and R. Depine, J. Modern Opt. 40, 1273 (1993).

Proc. IEEE

T. K. Gaylord and M. G. Moharam, Proc. IEEE 73, 894 (1985).

Proc. SPIE

B. Stenkamp, M. Abraham, W. Ehrfeld, E. Knapek, M. Hintermaier, M. T. Gale, and R. Morf, Proc. SPIE 2213, 288 (1994).

Other

For example, see M. Koeda and M. Kawata, Shimazu Hyoron 48, 393 (1992). (in Japanese)

M. Neviere, in Electromagnetic Theory and Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 5.

D. Maystre, in Electromagnetic Surface Modes, A. D. Boarman, ed. (Wiley, New York, 1982), Chap. 17.

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