Abstract

We present a real-time optical system to enhance defects in periodic patterns by use of nonlinear spatial filtering by real-time holography. A straight and equispaced grating written in a bacteriorhodopsin film is read by the Fourier transform of a periodic pattern to be inspected. Because the diffraction efficiency of the grating depends on the intensity of the reading beam, only the defect component can be selectively diffracted and imaged. This system is applicable even to moving objects. We present experimental results that show enhancement of defects as small as 10 µm in a photomask with a pixel pitch of 150 µm used for a liquid-crystal display.

© 1997 Optical Society of America

Full Article  |  PDF Article
Related Articles
Rotation-, shift-, and magnification-insensitive periodic-pattern-defects optical detection system

Akito Iwamoto and Hidekazu Sekizawa
Appl. Opt. 19(7) 1196-1200 (1980)

Defect-type discriminating optical system

Akito Iwamoto and Hidekazu Sekizawa
Appl. Opt. 20(9) 1724-1726 (1981)

Photorefractive Fe:LiNbO3 crystal thin plates for optical information processing

Shiuan Huei Lin, Mei Li Hsieh, Ken Yuh Hsu, Tai Chiung Hsieh, Sheuan-Perng Lin, Tung-Sheng Yeh, Long-Jang Hu, Chin-Hwa Lin, and Hong Chang
J. Opt. Soc. Am. B 16(7) 1112-1119 (1999)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription