Abstract

We present a real-time optical system to enhance defects in periodic patterns by use of nonlinear spatial filtering by real-time holography. A straight and equispaced grating written in a bacteriorhodopsin film is read by the Fourier transform of a periodic pattern to be inspected. Because the diffraction efficiency of the grating depends on the intensity of the reading beam, only the defect component can be selectively diffracted and imaged. This system is applicable even to moving objects. We present experimental results that show enhancement of defects as small as 10 µm in a photomask with a pixel pitch of 150 µm used for a liquid-crystal display.

© 1997 Optical Society of America

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