Abstract

We propose and demonstrate the direct recording of submicrometer relief gratings in amorphous hydrogenated carbon ($a$-C:H) films by reactive ion etching (RIE) for use as diffractive optical components. The high refractive index of this film and its transparency in the IR make such structures promising candidates for IR-transmission diffractive optical components. The structures are holographically recorded in photoresist and then transferred to a thin aluminum layer that is used as a mask for RIE of the $a$-C:H films. The diffraction measurements of the structures recorded in these films demonstrated the feasibility of using the materials as diffractive optical components.

© 1997 Optical Society of America

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