Abstract

We propose and demonstrate the direct recording of submicrometer relief gratings in amorphous hydrogenated carbon (a-C:H) films by reactive ion etching (RIE) for use as diffractive optical components. The high refractive index of this film and its transparency in the IR make such structures promising candidates for IR-transmission diffractive optical components. The structures are holographically recorded in photoresist and then transferred to a thin aluminum layer that is used as a mask for RIE of the a-C:H films. The diffraction measurements of the structures recorded in these films demonstrated the feasibility of using the materials as diffractive optical components.

© 1997 Optical Society of America

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References

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  1. L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
    [CrossRef]
  2. J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.
  3. M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
    [CrossRef]
  4. K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
    [CrossRef]
  5. R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
    [CrossRef]
  6. J. Frejlich, L. Cascato, and G. F. Mendes, Appl. Opt. 27, 1967 (1988).
    [CrossRef] [PubMed]
  7. C. R. A. Lima and L. Cescato, Opt. Eng. 35, 2804 (1996).
    [CrossRef]
  8. B. M. Assunção, F. da Costa, C. R. A. de Lima, and L. Cescato, Appl. Opt. 34, 597 (1995).
    [CrossRef]
  9. R. Petit, Electromagnetic Theory of Gratings, Vol.  22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980).
    [CrossRef]

1996 (1)

C. R. A. Lima and L. Cescato, Opt. Eng. 35, 2804 (1996).
[CrossRef]

1995 (3)

B. M. Assunção, F. da Costa, C. R. A. de Lima, and L. Cescato, Appl. Opt. 34, 597 (1995).
[CrossRef]

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

1988 (1)

1986 (1)

M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
[CrossRef]

1976 (1)

L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
[CrossRef]

Angus, J. C.

J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.

Assunção, B. M.

Callegari, S.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Cascato, L.

Cescato, L.

da Costa, F.

de Lima, C. R. A.

Domitz, S.

J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.

Falk, G.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Ferguson, R.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Frejlich, J.

Günther, E.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Hammerschimidt, A.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Hikita, M.

M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
[CrossRef]

Holland, L.

L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
[CrossRef]

Kakuchi, M.

M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
[CrossRef]

Koidl, P.

J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.

Kragler, K.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Leuschner, R.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Liebmann, L.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Lima, C. R. A.

C. R. A. Lima and L. Cescato, Opt. Eng. 35, 2804 (1996).
[CrossRef]

Martino, R.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Mendes, G. F.

Molless, A.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Neisser, M.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Ojha, S. M.

L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
[CrossRef]

Petit, R.

R. Petit, Electromagnetic Theory of Gratings, Vol.  22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980).
[CrossRef]

Saemann-Ischenko, G.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Tamamura, T.

M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
[CrossRef]

von Seggern, H.

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

Weed, J.

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Appl. Opt. (2)

Appl. Phys. Lett. (2)

M. Kakuchi, M. Hikita, and T. Tamamura, Appl. Phys. Lett. 48, 835 (1986).
[CrossRef]

K. Kragler, E. Günther, R. Leuschner, G. Falk, A. Hammerschimidt, H. von Seggern, and G. Saemann-Ischenko, Appl. Phys. Lett. 67, 1163 (1995).
[CrossRef]

J. Vac. Sci. Technol. B (1)

R. Martino, R. Ferguson, A. Molless, L. Liebmann, M. Neisser, J. Weed, and S. Callegari, J. Vac. Sci. Technol. B 13, 2949 (1995).
[CrossRef]

Opt. Eng. (1)

C. R. A. Lima and L. Cescato, Opt. Eng. 35, 2804 (1996).
[CrossRef]

Thin Solid Films (1)

L. Holland and S. M. Ojha, Thin Solid Films 58, 107 (1976).
[CrossRef]

Other (2)

J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, J. Mort and F. Jansen, eds. (CRC, Boca Raton, Fla., 1986), p. 89.

R. Petit, Electromagnetic Theory of Gratings, Vol.  22 of Topics in Current Physics (Springer-Verlag, Berlin, 1980).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Schematic of the recording processes.

Fig. 2
Fig. 2

Scanning electron microscope photographs of the structures recorded in a-C:H films: (a) cross section of the sample, (b) perspective view.

Fig. 3
Fig. 3

Diffraction measurements of the grating recorded in a-C:H film by transmission with a GaAs laser λ=832 nm as a function of the incident angle and the corresponding theoretical curves (a) for TE polarization of the incident light (electric field parallel to the grating lines) and (b) for TM polarization.

Fig. 4
Fig. 4

Transmission measurements of the same grating recorded in a-C:H film as a function of the wavelength and associated the theoretical curves for TE polarization and TM polarization.

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