Abstract

As a novel application of silicon-based integrated optics, results from a proposed compact Mach–Zehnder interferometer are presented. The deposition of a ZnO thin-film transducer upon the reference arm of the interferometer transforms this optically passive device into a device with active sinusoidal phase modulation.

© 1997 Optical Society of America

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References

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  1. R. G. Hunsperger, Integrated Optics: Theory and Technology (Springer-Verlag, Berlin, 1991).
  2. C. H. Von Helmolt, J. Lightwave Technol. LT-5, 218 (1987).
    [CrossRef]
  3. S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).
  4. C. P. Sandbank and M. B. N. Butler, Electron. Lett. 7, 501 (1971).
    [CrossRef]
  5. F. S. Hickernell, J. Appl. Phys. 44, 1061 (1973).
    [CrossRef]
  6. C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
    [CrossRef]
  7. W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
    [CrossRef]
  8. G. S. Kino and R. S. Wagers, J. Appl. Phys. 44, 1480 (1973).
    [CrossRef]
  9. W. Pushert, Opt. Commun. 10, 357 (1974).
    [CrossRef]

1997 (1)

C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
[CrossRef]

1987 (1)

C. H. Von Helmolt, J. Lightwave Technol. LT-5, 218 (1987).
[CrossRef]

1984 (1)

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

1974 (1)

W. Pushert, Opt. Commun. 10, 357 (1974).
[CrossRef]

1973 (2)

F. S. Hickernell, J. Appl. Phys. 44, 1061 (1973).
[CrossRef]

G. S. Kino and R. S. Wagers, J. Appl. Phys. 44, 1480 (1973).
[CrossRef]

1971 (1)

C. P. Sandbank and M. B. N. Butler, Electron. Lett. 7, 501 (1971).
[CrossRef]

1969 (1)

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Butler, M. B. N.

C. P. Sandbank and M. B. N. Butler, Electron. Lett. 7, 501 (1971).
[CrossRef]

Chollet, F.

C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
[CrossRef]

Collins, J. H.

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Gerard, H. M.

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Gidon, P.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Gorecki, C.

C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
[CrossRef]

Hickernell, F. S.

F. S. Hickernell, J. Appl. Phys. 44, 1061 (1973).
[CrossRef]

Hunsperger, R. G.

R. G. Hunsperger, Integrated Optics: Theory and Technology (Springer-Verlag, Berlin, 1991).

Jadot, J. P.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Kawakatsu, H.

C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
[CrossRef]

Kino, G. S.

G. S. Kino and R. S. Wagers, J. Appl. Phys. 44, 1480 (1973).
[CrossRef]

Lizet, J.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Mottier, P.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Pushert, W.

W. Pushert, Opt. Commun. 10, 357 (1974).
[CrossRef]

Reeder, T. M.

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Renard, S.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Sandbank, C. P.

C. P. Sandbank and M. B. N. Butler, Electron. Lett. 7, 501 (1971).
[CrossRef]

Shaw, H. J.

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Smith, W. R.

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

Valette, S.

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Von Helmolt, C. H.

C. H. Von Helmolt, J. Lightwave Technol. LT-5, 218 (1987).
[CrossRef]

Wagers, R. S.

G. S. Kino and R. S. Wagers, J. Appl. Phys. 44, 1480 (1973).
[CrossRef]

Electron. Lett. (1)

C. P. Sandbank and M. B. N. Butler, Electron. Lett. 7, 501 (1971).
[CrossRef]

IEEE Trans. Microwave Theor. Tech. (1)

W. R. Smith, H. M. Gerard, J. H. Collins, T. M. Reeder, and H. J. Shaw, IEEE Trans. Microwave Theor. Tech. MTT-17, 856 (1969).
[CrossRef]

J. Appl. Phys. (2)

G. S. Kino and R. S. Wagers, J. Appl. Phys. 44, 1480 (1973).
[CrossRef]

F. S. Hickernell, J. Appl. Phys. 44, 1061 (1973).
[CrossRef]

J. Lightwave Technol. (1)

C. H. Von Helmolt, J. Lightwave Technol. LT-5, 218 (1987).
[CrossRef]

Opt. Commun. (1)

W. Pushert, Opt. Commun. 10, 357 (1974).
[CrossRef]

Proc. Inst. Electr. Eng. Part H (1)

S. Valette, J. Lizet, P. Mottier, J. P. Jadot, P. Gidon, and S. Renard, Proc. Inst. Electr. Eng. Part H 131, 325 (1984).

Proc. SPIE (1)

C. Gorecki, F. Chollet, and H. Kawakatsu, Proc. SPIE 3008, 152 (1997).
[CrossRef]

Other (1)

R. G. Hunsperger, Integrated Optics: Theory and Technology (Springer-Verlag, Berlin, 1991).

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Figures (6)

Fig. 1
Fig. 1

Schematic diagram of the Mach–Zehnder interferometer architecture.

Fig. 2
Fig. 2

Structure the of SiO2–SiON–SiO2 strip-load waveguide.

Fig. 3
Fig. 3

Optical field distribution of a single-mode strip-load waveguide λ=660 nm calculated by use of the beam-propagation method.

Fig. 4
Fig. 4

Scanning electron microscope photographs of structures: a, Y junction with a 4µm rib; b, Al interdigital electrode.

Fig. 5
Fig. 5

Comparison of theoretical (calculated) and measured conversion losses for a delay line with a 15-finger-pair transducer.

Fig. 6
Fig. 6

Measured modulation spectrum at 7-mW SAW power.

Equations (1)

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1Q=ω0NCSRA=NπΔνν=π2Nk2, k2=2Δνν,

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