Abstract

We propose a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption with a pulsed infrared laser. An experimental system for the microfabrication has been developed with a Ti:sapphire laser whose oscillating wavelength and pulse width are 790 nm and 200 fs, respectively. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers, and urethane acrylate oligomers.

© 1997 Optical Society of America

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  1. T. Takagi and N. Nakajima, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 211.
  2. K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.
  3. A. S. Kewitsch and A. Yariv, Opt. Lett. 21, 24 (1996).
  4. S. Kawata and T. Tani, Opt. Lett. 21, 1768 (1996).
  5. S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).
  6. L. P. Ghislain and W. W. Webb, Opt. Lett. 18, 1678 (1993).
  7. E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).
  8. W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).
  9. O. Nakamura, Optik 93, 39 (1993).
  10. O. Nakamura and T. Okada, Optik 100, 167 (1995).
  11. E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).
  12. J. H. Strickler, and W. W. Webb, Proc. SPIE 1398, 107 (1990).
  13. T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

1996

1995

O. Nakamura and T. Okada, Optik 100, 167 (1995).

1994

T. Takagi and N. Nakajima, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 211.

K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).

1993

L. P. Ghislain and W. W. Webb, Opt. Lett. 18, 1678 (1993).

O. Nakamura, Optik 93, 39 (1993).

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

1992

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

1990

J. H. Strickler, and W. W. Webb, Proc. SPIE 1398, 107 (1990).

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Denk, W.

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Ghislain, L. P.

Harimaya, H.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

Harrell, W. R.

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

Higurashi, E.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

Hirowatari, K.

K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.

Ikuta, K.

K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.

Inouye, Y.

S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).

Kawata, S.

S. Kawata and T. Tani, Opt. Lett. 21, 1768 (1996).

S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).

Kewitsch, A. S.

Kurihara, F.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

Nakajima, N.

T. Takagi and N. Nakajima, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 211.

Nakamura, O.

O. Nakamura and T. Okada, Optik 100, 167 (1995).

O. Nakamura, Optik 93, 39 (1993).

Ogata, T.

K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.

Ohguchi, O.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

Okada, T.

O. Nakamura and T. Okada, Optik 100, 167 (1995).

Okawa, M.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

Strickler, J. H.

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

J. H. Strickler, and W. W. Webb, Proc. SPIE 1398, 107 (1990).

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Sugiura, T.

S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).

Takagi, T.

T. Takagi and N. Nakajima, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 211.

Tanaka, H.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

Tani, T.

Ukachi, T.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

Ukita, H.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

Watanabe, T.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

Webb, W. W.

L. P. Ghislain and W. W. Webb, Opt. Lett. 18, 1678 (1993).

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

J. H. Strickler, and W. W. Webb, Proc. SPIE 1398, 107 (1990).

Wu, E. S.

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

Yariv, A.

Appl. Phys. Lett.

E. Higurashi, H. Ukita, H. Tanaka, and O. Ohguchi, Appl. Phys. Lett. 64, 2209 (1994).

Jpn. J. Appl. Phys.

S. Kawata, Y. Inouye, and T. Sugiura, Jpn. J. Appl. Phys. 33, L1725 (1994).

Opt. Lett.

Optik

O. Nakamura, Optik 93, 39 (1993).

O. Nakamura and T. Okada, Optik 100, 167 (1995).

Proc. SPIE

E. S. Wu, J. H. Strickler, W. R. Harrell, and W. W. Webb, Proc. SPIE 1674, 776 (1992).

J. H. Strickler, and W. W. Webb, Proc. SPIE 1398, 107 (1990).

Science

W. Denk, J. H. Strickler, and W. W. Webb, Science 248, 73 (1990).

Other

T. Takagi and N. Nakajima, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 211.

K. Ikuta, K. Hirowatari, and T. Ogata, in Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, New York, 1994), p. 1.

T. Watanabe, M. Okawa, T. Ukachi, F. Kurihara, and H. Harimaya, in Proceedings of RadTech Asia ’93 (RadTech, Japan, Tokyo, 1993), p. 462.

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