Abstract

A simplified method for planarizing liquid-crystal-on-silicon (LCOS) backplanes is presented. The method relies on the planarizing capability of spin-cast benzocyclobutene (BCB) polymeric resin. BCB planarization shows a sixfold reduction in step height on the surface of a typical LCOS backplane. Contact with the underlying pixel circuitry is made by dry etching through openings in the BCB layer. Reflective metal (87% reflectivity) is deposited over the planarized surface and patterned to form high-aperture-ratio pixel mirrors (84%). An average resistance of 0.75 Ω per via was achieved with 3.6-µm-diameter vias in 2-µm-thick BCB. The method and the results of this LCOS backplane planarization and postprocessing are described.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Miniature liquid-crystal-on-silicon display assembly

Peter T. Kazlas, Kristina M. Johnson, and Douglas J. McKnight
Opt. Lett. 23(12) 972-974 (1998)

High-contrast, fast-switching liquid-crystal-on-silicon microdisplay with a frame buffer pixel array

Sangrok Lee, Michael Sullivan, Chongchang Mao, and Kristina M. Johnson
Opt. Lett. 29(7) 751-753 (2004)

Improving the performance of liquid-crystal-over-silicon spatial light modulators: issues and achievements

Ian Underwood, David G. Vass, Antony O’Hara, Dwayne C. Burns, Peter W. McOwan, and James Gourlay
Appl. Opt. 33(14) 2768-2774 (1994)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription