Abstract

The polarization of light scattered by silicon with a small degree of microroughness was measured out of the plane of incidence. First-order vector perturbation theory for scattering from a rough surface predicts the behavior well. The data and the theory show Brewster-like angles where $p\to p$ scattering from surface microroughness vanishes, as well as a deterministic polarization in other directions.

© 1997 Optical Society of America

Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness

Thomas A. Germer
Appl. Opt. 36(33) 8798-8805 (1997)

Polarization of light scattered by microrough surfaces and subsurface defects

Thomas A. Germer and Clara C. Asmail
J. Opt. Soc. Am. A 16(6) 1326-1332 (1999)

Polarized light-scattering measurements of dielectric spheres upon a silicon surface

Lipiin Sung, George W. Mulholland, and Thomas A. Germer
Opt. Lett. 24(13) 866-868 (1999)

Polarized light scattering by microroughness and small defects in dielectric layers

Thomas A. Germer
J. Opt. Soc. Am. A 18(6) 1279-1288 (2001)

Large-angle in-plane light scattering from rough surfaces: comment

Thomas A. Germer
Appl. Opt. 40(31) 5708-5710 (2001)