Abstract

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-µm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18  nm, and a free-spectral range of 21.6  nm in the 1.55-µm-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-µm-diameter ring and disk resonators to show the feasibility of such devices.

© 1997 Optical Society of America

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  1. D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.
  2. S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.
  3. J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
    [CrossRef]
  4. T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
    [CrossRef]
  5. K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
    [CrossRef]
  6. E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2103 (1969).
    [CrossRef]
  7. E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2071 (1969).
    [CrossRef]
  8. M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
    [CrossRef]

1996 (1)

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

1994 (2)

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
[CrossRef]

1993 (1)

T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
[CrossRef]

1969 (2)

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2103 (1969).
[CrossRef]

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2071 (1969).
[CrossRef]

Bi, W. G.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

Chin, M. K.

M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
[CrossRef]

Chu, D. Y.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
[CrossRef]

Hagness, S. C.

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Hibino, Y.

T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
[CrossRef]

Ho, S. T.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
[CrossRef]

S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Kominato, T.

T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
[CrossRef]

Marcatili, E. A. J.

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2103 (1969).
[CrossRef]

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2071 (1969).
[CrossRef]

Oda, K.

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

Onose, K.

T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
[CrossRef]

Rafizadeh, D.

S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Suzuki, S.

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

Taflove, A.

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Takahashi, H.

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

Tiberio, R. C.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Toba, H.

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

Tu, C. W.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

Wang, L.

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Wu, S. L.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

Zhang, J. P.

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

Bell Syst. Tech. J. (2)

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2103 (1969).
[CrossRef]

E. A. J. Marcatili, Bell Syst. Tech. J. 48, 2071 (1969).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tiberio, C. W. Tu, and S. T. Ho, IEEE Photon. Technol. Lett. 8, 968 (1996).
[CrossRef]

T. Kominato, Y. Hibino, and K. Onose, IEEE Photon. Technol. Lett. 5, 560 (1993).
[CrossRef]

K. Oda, S. Suzuki, H. Takahashi, and H. Toba, IEEE Photon. Technol. Lett. 6, 1031 (1994).
[CrossRef]

J. Appl. Phys. (1)

M. K. Chin, D. Y. Chu, and S. T. Ho, J. Appl. Phys. 75, 3302 (1994).
[CrossRef]

Other (2)

D. Rafizadeh, J. P. Zhang, L. Wang, S. C. Hagness, A. Taflove, R. C. Tiberio, and S. T. Ho, paper ThP4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

S. C. Hagness, D. Rafizadeh, S. T. Ho, and A. Taflove, paper ThZ4 presented at the Optical Society of America Annual Meeting, Rochester, New York, October 20–25, 1996.

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Figures (5)

Fig. 1
Fig. 1

(a) Illustration of the fabricated ring or disk resonator geometry and (b)–(d) infrared camera images showing switching of light from port  Z to port  Y at the 1555.6-nm resonance of the 10.5-µm-diameter disk.

Fig. 2
Fig. 2

SEM images of a 10.5-µm-diameter (a) disk and (b) ring.

Fig. 3
Fig. 3

Measured (experimental) and calculated reflectivity, showing resonances from a 10.5-µm disk with 2% coupling and α=1.6/cm.

Fig. 4
Fig. 4

(a) Measured transmission of the 10.5-µm-diameter disk. (b) Fine-resolution spectral scan of the 10.5-µm-disk transmitted peak centered at 1555.6  nm and the calculated transmission (dotted curve).

Fig. 5
Fig. 5

Reflectivity of the (a) 10-µm disk, (b) 10.5-µm ring, (c) 20.5-µm disk, and (d) 20.5-µm ring. ΔλFWHM() and Δλfsr() are indicated in the graphs.

Equations (2)

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1-tmax1+F sin22πneffλl/λ0,
Δλfsr=neffλm2lm-neffλm+12lm+1.

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