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Optoelectronic-VLSI packaging with polarization-selective computer-generated holograms

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Abstract

We present what is believed to be the first packaged module incorporating polarization-based beam-forming optics integrated with an optoelectronic–VLSI device. The chip has multiple quantum-well modulators and detectors that are flip-chip bonded onto a silicon CMOS integrated circuit. In the assembled module a polarization-selective computer-generated hologram converts linearly polarized light into a two-dimensional spot array to illuminate the output modulators. The lenslets do not interfere with the input data or the reflected output, which is orthogonally polarized. We demonstrate a 9×10 modulator array, showing good spot-intensity uniformity and registration with modulators.

© 1997 Optical Society of America

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