Abstract

We have designed, microfabricated, and characterized a diffractive optical element that reproduces the infrared spectrum of HF from 3600 to 4300  cm-1. The reflection-mode diffractive optic consists of 4096 lines, each 4.5 µm wide, at 16 discrete depths relative to the substrate from 0 to 1.2 µm and was fabricated upon a silicon wafer by anisotropic reactive ion-beam etching in a four-mask-level process. We envisage the use of diffractive optical elements of this type as the basis for a new class of miniaturized, remote chemical sensor systems based on correlation spectroscopy.

© 1997 Optical Society of America

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