Abstract

The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5–16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV $\left(\lambda <30.0 \mathrm{nm}\right)$. Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%.

© 1997 Optical Society of America

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

Efficiency and long-term stability of a multilayer-coated, ion-etched blazed holographic grating in the 125–133-Å wavelength region

M. P. Kowalski, T. W. Barbee, R. G. Cruddace, J. F. Seely, J. C. Rife, and W. R. Hunter
Appl. Opt. 34(31) 7338-7346 (1995)

Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5–6.9-nm wavelength region

Sadayuki Ishikawa, Takashi Imazono, Tadashi Hatano, Mihiro Yanagihara, and Makoto Watanabe
Appl. Opt. 41(4) 763-767 (2002)

MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

C. Montcalm, S. Bajt, and J. F. Seely
Opt. Lett. 26(3) 125-127 (2001)