Rapid and scalable scans at 21  m/s in optical low-coherence reflectometry

Abstract

An optical low-coherence reflectometer is presented that uses a fiber Michelson interferometer with a rotating cube to generate rapid depth scans at a high repetition rate. A folded optical path geometry allows the reference arm to scale up the scan range, scan speed, and scan repetitiveness. Thickness measurements with a repetitiveness of 384  Hz and a longitudinal scanning speed of 21  m/s in air over a range of $\sim 3$  mm are demonstrated.

© 1997 Optical Society of America

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