Abstract

High-power sub-100-fs UV pulses were generated from a KrF excimer laser by spectral control and chirped-pulse amplification. The spectral width was broadened to 1.6 nm, resulting in 72-fs, nearly transform-limited pulses. The average output powers at 1 kHz were 0.6 and 1.2 W for pulse widths of 72 and 110 fs, respectively.

© 1997 Optical Society of America

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