Abstract

A new microfabrication technology for the design and realization of 1×n and n×n fiber-optic switches, x, xy, and xyz translational stages, optical scanners, fiber–fiber couplers, and fiber–planar-waveguide couplers is presented. This technology is based on bulk anisotropic etching and offers significant improvements over present micro-optical and microphotonic devices. With this new enabling technology we have fabricated 200-µm–2-cm translational stages for use in beam steering and fiber-optic switching applications. We present the fabrication and characterization of a 1×n micromechanical fiber-optic switch using this new technology. These nonoptimized devices have switching times of <10 ms with <-1-dB loss.

© 1997 Optical Society of America

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