Abstract

Two diffraction gratings placed in front of a flat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 μm, depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.

© 1996 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Lloyd Interferometer Applied to Flatness Testing

P. H. Langenbeck
Appl. Opt. 6(10) 1707-1714 (1967)

Semiconductor wafer and technical flat planeness testing interferometer

Johannes Schwider, R. Burow, K.-E. Elssner, J. Grzanna, and R. Spolaczyk
Appl. Opt. 25(7) 1117-1121 (1986)

Diffractive grazing-incidence interferometer

Peter de Groot
Appl. Opt. 39(10) 1527-1530 (2000)

More Recommended Articles

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription