Abstract

We propose a novel technique for simultaneous measurement of layer thicknesses and refractive indices of multiple layers. It is based on a combination of a confocal microscope and low-coherence interferometry. We derived an expression for the geometrical thickness and the refractive index of each layer from both tracing of a marginal ray accepted by a microscope objective and optical path matching conditions. Experimental verification of this method is illustrated by several samples that have a maximum of 13 layers. The geometrical thicknesses and refractive indices thus derived agreed well with those measured by a micrometer or cited from the literature.

© 1996 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription