Abstract

We report a near-field optical microscopy experiment at λ = 10.6 μm, using an apertureless metallic tip functioning simultaneously in the atomic force microscopy tapping mode. The 17-nm optical resolution (λ/600) that we achieved confirms the validity and the potential of this concept for numerous applications.

© 1996 Optical Society of America

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References

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  1. D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
    [CrossRef]
  2. U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
    [CrossRef]
  3. E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
    [CrossRef] [PubMed]
  4. E. Betzig, J. K. Trautman, Science 257, 189 (1992).
    [CrossRef] [PubMed]
  5. E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
    [CrossRef]
  6. R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
    [CrossRef]
  7. M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
    [CrossRef] [PubMed]
  8. F. Zenhausern, Y. Martin, H. K. Wickramasinghe, Science 269, 1083 (1995).
    [CrossRef] [PubMed]
  9. R. Bachelot, P. Gleyzes, A. C. Baccara, Opt. Lett. 20, 1924 (1995).
    [CrossRef] [PubMed]
  10. D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
    [CrossRef]
  11. F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
    [CrossRef]
  12. J. A. Cline, M. Isaacson, Appl. Opt. 34, 4869 (1995).
    [CrossRef] [PubMed]

1995 (3)

1994 (1)

R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
[CrossRef]

1993 (1)

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

1992 (2)

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

E. Betzig, J. K. Trautman, Science 257, 189 (1992).
[CrossRef] [PubMed]

1991 (1)

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

1989 (1)

D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
[CrossRef]

1987 (1)

E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
[CrossRef]

1986 (1)

U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
[CrossRef]

1984 (1)

D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
[CrossRef]

Baccara, A. C.

Bachelot, R.

R. Bachelot, P. Gleyzes, A. C. Baccara, Opt. Lett. 20, 1924 (1995).
[CrossRef] [PubMed]

R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
[CrossRef]

Betzig, E.

E. Betzig, J. K. Trautman, Science 257, 189 (1992).
[CrossRef] [PubMed]

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
[CrossRef]

Boccara, A. C.

R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
[CrossRef]

Cline, J. A.

Courjon, D.

D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
[CrossRef]

DeFornel, F.

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

Denk, W.

D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
[CrossRef]

Dürig, U.

U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
[CrossRef]

Gleyzes, P.

R. Bachelot, P. Gleyzes, A. C. Baccara, Opt. Lett. 20, 1924 (1995).
[CrossRef] [PubMed]

R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
[CrossRef]

Goudonnet, J. P.

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

Hänsch, T. W.

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

Harris, T. D.

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

Heckl, W. M.

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

Isaacson, M.

J. A. Cline, M. Isaacson, Appl. Opt. 34, 4869 (1995).
[CrossRef] [PubMed]

E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
[CrossRef]

Kostelak, R. L.

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

Lanz, M.

D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
[CrossRef]

Lesniewska, E.

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

Lewis, A.

E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
[CrossRef]

Martin, Y.

F. Zenhausern, Y. Martin, H. K. Wickramasinghe, Science 269, 1083 (1995).
[CrossRef] [PubMed]

Pedarnig, J. D.

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

Pohl, D. W.

U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
[CrossRef]

D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
[CrossRef]

Rohner, F.

U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
[CrossRef]

Salomon, L.

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

Sarayeddine, K.

D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
[CrossRef]

Spajer, M.

D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
[CrossRef]

Specht, M.

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

Trautman, J. K.

E. Betzig, J. K. Trautman, Science 257, 189 (1992).
[CrossRef] [PubMed]

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

Weiner, J. S.

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

Wickramasinghe, H. K.

F. Zenhausern, Y. Martin, H. K. Wickramasinghe, Science 269, 1083 (1995).
[CrossRef] [PubMed]

Zenhausern, F.

F. Zenhausern, Y. Martin, H. K. Wickramasinghe, Science 269, 1083 (1995).
[CrossRef] [PubMed]

Appl. Opt. (1)

Appl. Phys. Lett. (2)

D. W. Pohl, W. Denk, M. Lanz, Appl. Phys. Lett. 44, 651 (1984).
[CrossRef]

E. Betzig, M. Isaacson, A. Lewis, Appl. Phys. Lett. 51, 2088 (1987).
[CrossRef]

J. Appl. Phys. (1)

U. Dürig, D. W. Pohl, F. Rohner, J. Appl. Phys. 59, 3318 (1986).
[CrossRef]

Microscopy Microanalysis Microstructures (1)

R. Bachelot, P. Gleyzes, A. C. Boccara, Microscopy Microanalysis Microstructures 5, 389 (1994).
[CrossRef]

Opt. Commun. (2)

D. Courjon, K. Sarayeddine, M. Spajer, Opt. Commun. 71, 23 (1989).
[CrossRef]

F. DeFornel, E. Lesniewska, L. Salomon, J. P. Goudonnet, Opt. Commun. 102, 1 (1993).
[CrossRef]

Opt. Lett. (1)

Phys. Rev. Lett. (1)

M. Specht, J. D. Pedarnig, W. M. Heckl, T. W. Hänsch, Phys. Rev. Lett. 68, 476 (1992).
[CrossRef] [PubMed]

Science (3)

F. Zenhausern, Y. Martin, H. K. Wickramasinghe, Science 269, 1083 (1995).
[CrossRef] [PubMed]

E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, R. L. Kostelak, Science 251, 1468 (1991).
[CrossRef] [PubMed]

E. Betzig, J. K. Trautman, Science 257, 189 (1992).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

Diagram of the apertureless near-field optical microscope functioning in the mid-IR region. PZT's piezoelectric transducers.

Fig. 2
Fig. 2

IR SNOM signal versus Cassegrain objective z position.

Fig. 3
Fig. 3

Near-field images of the 500- (500-) nm Au (Si) grating: (a) relief determined by AFM, (b) IR SNOM. The arrow represents the direction of the incident light beam. This incidence is grazing the sample surface (which is in the page plane).

Fig. 4
Fig. 4

Near-field images of the Au surface: (a) AFM, (b) AFM profile along the line x = 200 nm, (c) IR SNOM, (d) IR SNOM profile along the line x = 200 nm.

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