Abstract

The design of a silicon-based antiresonant reflecting optical waveguide (ARROW) chemical sensor is presented, and its theoretical performance is compared with that of a conventional structure. The use of an ARROW structure permits incorporation of a thick guiding region for efficient coupling to a single-mode fiber. A high-index overlay is added to fine tune the sensitivity of the ARROW chemical sensor. The sensitivity of the sensor is presented, and design trade-offs are discussed.

© 1996 Optical Society of America

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References

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  1. A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
    [CrossRef]
  2. F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).
  3. A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
    [CrossRef]
  4. S. Kang, K. Sasaki, H. Minamitani, Appl. Opt. 32, 3544 (1993).
    [CrossRef] [PubMed]
  5. R. Heidman, R. Kooyman, J. Greeve, B. Altenburg, Appl. Opt. 30, 1474 (1991).
    [CrossRef]
  6. C. Stamm, W. Lukosz, Sensors Actuators B 18, 183 (1994).
    [CrossRef]
  7. J. Chilwell, I. Hodgkinson, J. Opt. Soc. Am. A 1, 742 (1984).
    [CrossRef]
  8. G. Hocker, W. Burns, Appl. Opt. 16, 113 (1977).
    [CrossRef] [PubMed]
  9. K. Chiang, Opt. Lett. 16, 714 (1991).
    [CrossRef] [PubMed]
  10. T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
    [CrossRef]
  11. K. Remley, A. Weisshaar, J. Lightwave Technol. 13, 2372 (1995).
    [CrossRef]
  12. B. Stewart, B. Culshaw, Opt. Quantum Electron. 26, 249 (1994).
    [CrossRef]
  13. W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
    [CrossRef]

1995 (1)

K. Remley, A. Weisshaar, J. Lightwave Technol. 13, 2372 (1995).
[CrossRef]

1994 (2)

B. Stewart, B. Culshaw, Opt. Quantum Electron. 26, 249 (1994).
[CrossRef]

C. Stamm, W. Lukosz, Sensors Actuators B 18, 183 (1994).
[CrossRef]

1993 (3)

A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
[CrossRef]

F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).

S. Kang, K. Sasaki, H. Minamitani, Appl. Opt. 32, 3544 (1993).
[CrossRef] [PubMed]

1992 (2)

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

1991 (2)

1988 (1)

T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
[CrossRef]

1984 (1)

1977 (1)

Altenburg, B.

Baba, T.

T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
[CrossRef]

Bhullar, B.

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Boiarski, A.

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Brandenburg, A.

A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
[CrossRef]

Burns, W.

Bush, J.

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Chiang, K.

Chilwell, J.

Chow, Y.

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

Culshaw, B.

B. Stewart, B. Culshaw, Opt. Quantum Electron. 26, 249 (1994).
[CrossRef]

Edelhauser, R.

A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
[CrossRef]

Greeve, J.

Heidman, R.

Hocker, G.

Hodgkinson, I.

Huang, W.

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

Hutter, F.

A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
[CrossRef]

Iga, K.

T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
[CrossRef]

Jin, W.

F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).

Kang, S.

Kooyman, R.

Lukosz, W.

C. Stamm, W. Lukosz, Sensors Actuators B 18, 183 (1994).
[CrossRef]

Minamitani, H.

Muhammad, F.

F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).

Nathan, A.

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

Remley, K.

K. Remley, A. Weisshaar, J. Lightwave Technol. 13, 2372 (1995).
[CrossRef]

Ridgway, R.

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Sakaki, T.

T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
[CrossRef]

Sasaki, K.

Shubair, R.

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

Stamm, C.

C. Stamm, W. Lukosz, Sensors Actuators B 18, 183 (1994).
[CrossRef]

Stewart, B.

B. Stewart, B. Culshaw, Opt. Quantum Electron. 26, 249 (1994).
[CrossRef]

F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).

Weisshaar, A.

K. Remley, A. Weisshaar, J. Lightwave Technol. 13, 2372 (1995).
[CrossRef]

Wood, V.

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Appl. Opt. (3)

J. Lightwave Technol. (3)

W. Huang, R. Shubair, A. Nathan, Y. Chow, J. Lightwave Technol. 10, 1015 (1992).
[CrossRef]

T. Baba, T. Sakaki, K. Iga, J. Lightwave Technol. 6, 1440 (1988).
[CrossRef]

K. Remley, A. Weisshaar, J. Lightwave Technol. 13, 2372 (1995).
[CrossRef]

J. Opt. Soc. Am. A (1)

Opt. Lett. (1)

Opt. Quantum Electron. (1)

B. Stewart, B. Culshaw, Opt. Quantum Electron. 26, 249 (1994).
[CrossRef]

Proc. Inst. Electr. Eng. Part J (1)

F. Muhammad, B. Stewart, W. Jin, Proc. Inst. Electr. Eng. Part J 140, 115 (1993).

Proc. SPIE (1)

A. Boiarski, J. Bush, B. Bhullar, R. Ridgway, V. Wood, Proc. SPIE 1793, 199 (1992).
[CrossRef]

Sensors Actuators B (2)

C. Stamm, W. Lukosz, Sensors Actuators B 18, 183 (1994).
[CrossRef]

A. Brandenburg, R. Edelhauser, F. Hutter, Sensors Actuators B 11, 361 (1993).
[CrossRef]

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Figures (6)

Fig. 1
Fig. 1

Refractive-index profile of a conventional silicon-based optical waveguide sensor.

Fig. 2
Fig. 2

Sensitivity of a conventional silicon-based dielectric waveguide refractometer.

Fig. 3
Fig. 3

Refractive-index profile of the ARROW sensor.

Fig. 4
Fig. 4

Sensitivity of an ARROW refractometer for various overlay thicknesses.

Fig. 5
Fig. 5

Comparison of effective indices and attenuation for the ARROW structure with two different cover layers: (a) air, (b) SiO2.

Fig. 6
Fig. 6

Transverse field profile for an ARROW sensor with a 0.018-μm overlay. The cover refractive indices are (a) ncover = 1.333, (b) ncover = 1.45.

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