Abstract

The design and performance of a new type of high-efficiency diffraction grating for use in either transmission or reflection are described. The gratings are produced in a multilayer dielectric coating deposited upon optically flat substrates. By proper design of the multilayer stack and grating structure, a diffraction efficiency in excess of 96% for polarized light in the m = −1 order in reflection has been achieved.

© 1995 Optical Society of America

Full Article  |  PDF Article

Corrections

M. D. Perry, C. Shannon, Lifeng Li, E. Shults, R. D. Boyd, J. A. Britten, D. Decker, and W. Shore, "High-efficiency multilayer dielectric diffraction gratings: erratum," Opt. Lett. 20, 1513-1513 (1995)
https://www.osapublishing.org/ol/abstract.cfm?uri=ol-20-13-1513

References

  • View by:
  • |
  • |
  • |

  1. D. Strickland, G. Mourou, Opt. Commun. 56, 219 (1985);P. Maine, D. Strickland, P. Bado, M. Pessot, G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988).
    [CrossRef]
  2. J. Kmetec, J. J. Macklin, J. F. Young, Opt. Lett. 16, 1001 (1991).
    [CrossRef] [PubMed]
  3. A. Sullivan, H. Hamster, H. C. Kapteyn, S. Gordon, W. White, H. Nathel, R. Blair, R. W. Falcone, Opt. Lett. 16, 1406 (1991).
    [CrossRef] [PubMed]
  4. M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
    [CrossRef] [PubMed]
  5. T. Ditmire, M. D. Perry, Opt. Lett. 18, 426 (1993);T. Ditmire, H. Nguyen, M. D. Perry, J. Opt. Soc. Am. B 11,580 (1993).
    [CrossRef] [PubMed]
  6. P. Beaud, M. Richardson, E. Miesak, B. T. Chai, Opt. Lett. 18, 1550 (1993).
    [CrossRef] [PubMed]
  7. M. D. Perry, F. G. Patterson, J. Weston, Opt. Lett. 15, 381 (1991).
    [CrossRef]
  8. C. Rouyer, E. Mazataud, I. Allais, A. Pierre, S. Seznec, C. Sauteret, A. Migus, G. Mourou, Opt. Lett. 18, 214 (1993).
    [CrossRef] [PubMed]
  9. E. B. Treacy, IEEE J. Quantum Electron. 5, 454 (1969).
    [CrossRef]
  10. M. C. Hutley, Diffraction Gratings (Academic, New York, 1982).
  11. R. D. Boyd, J. Britten, D. Decker, B. Shore, B. Stuart, M. D. Perry, L. Li, Appl. Opt. 34, 1697 (1995).
    [CrossRef] [PubMed]
  12. E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
    [CrossRef]
  13. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).
  14. R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980).
    [CrossRef]
  15. D. Maystre, in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1984), Vol. XXI, Chap. 1.
  16. L. Li, J. Opt. Soc. Am. A 10,2581 (1993);J. Mod. Opt. 40, 553 (1993).
    [CrossRef]
  17. L. Li, C. W. Haggans, J. Opt. Soc. Am. A 10,1184 (1993).
    [CrossRef]
  18. L. M. Hobrock, R. Withirington, H. Garvin, U.S. patent4,828,356 (May9, 1989).
  19. M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

1995 (1)

1993 (5)

1991 (3)

1990 (1)

E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
[CrossRef]

1989 (1)

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

1985 (1)

D. Strickland, G. Mourou, Opt. Commun. 56, 219 (1985);P. Maine, D. Strickland, P. Bado, M. Pessot, G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988).
[CrossRef]

1969 (1)

E. B. Treacy, IEEE J. Quantum Electron. 5, 454 (1969).
[CrossRef]

Allais, I.

Bado, P.

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

Beaud, P.

Blair, R.

Boyd, R. D.

Britten, J.

R. D. Boyd, J. Britten, D. Decker, B. Shore, B. Stuart, M. D. Perry, L. Li, Appl. Opt. 34, 1697 (1995).
[CrossRef] [PubMed]

M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

Chai, B. T.

Decker, D.

Ditmire, T.

Falcone, R. W.

Feit, M. D.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

Garvin, H.

L. M. Hobrock, R. Withirington, H. Garvin, U.S. patent4,828,356 (May9, 1989).

Gordon, S.

Haggans, C. W.

Hamster, H.

Harter, D.

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

Hobrock, L. M.

L. M. Hobrock, R. Withirington, H. Garvin, U.S. patent4,828,356 (May9, 1989).

Hutley, M. C.

M. C. Hutley, Diffraction Gratings (Academic, New York, 1982).

Kapteyn, H. C.

Kmetec, J.

Li, L.

Macklin, J. J.

Maystre, D.

E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
[CrossRef]

D. Maystre, in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1984), Vol. XXI, Chap. 1.

Mazataud, E.

Miesak, E.

Migus, A.

Mourou, G.

C. Rouyer, E. Mazataud, I. Allais, A. Pierre, S. Seznec, C. Sauteret, A. Migus, G. Mourou, Opt. Lett. 18, 214 (1993).
[CrossRef] [PubMed]

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

D. Strickland, G. Mourou, Opt. Commun. 56, 219 (1985);P. Maine, D. Strickland, P. Bado, M. Pessot, G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988).
[CrossRef]

Nathel, H.

Patterson, F. G.

Perry, M. D.

R. D. Boyd, J. Britten, D. Decker, B. Shore, B. Stuart, M. D. Perry, L. Li, Appl. Opt. 34, 1697 (1995).
[CrossRef] [PubMed]

T. Ditmire, M. D. Perry, Opt. Lett. 18, 426 (1993);T. Ditmire, H. Nguyen, M. D. Perry, J. Opt. Soc. Am. B 11,580 (1993).
[CrossRef] [PubMed]

M. D. Perry, F. G. Patterson, J. Weston, Opt. Lett. 15, 381 (1991).
[CrossRef]

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

Pessot, M.

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

Pierre, A.

Popov, E.

E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
[CrossRef]

Richardson, M.

Rouyer, C.

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

Sauteret, C.

Seznec, S.

Shannon, C.

M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

Shore, B.

Shore, B. W.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

Shults, E.

M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

Squier, J.

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

Strickland, D.

D. Strickland, G. Mourou, Opt. Commun. 56, 219 (1985);P. Maine, D. Strickland, P. Bado, M. Pessot, G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988).
[CrossRef]

Stuart, B.

Stuart, B. C.

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

Sullivan, A.

Treacy, E. B.

E. B. Treacy, IEEE J. Quantum Electron. 5, 454 (1969).
[CrossRef]

Tsonev, L.

E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
[CrossRef]

Weston, J.

White, W.

Withirington, R.

L. M. Hobrock, R. Withirington, H. Garvin, U.S. patent4,828,356 (May9, 1989).

Young, J. F.

Appl. Opt. (1)

IEEE J. Quantum Electron. (2)

M. Pessot, J. Squier, P. Bado, G. Mourou, D. Harter, IEEE J. Quantum Electron. 25, 61 (1989);M. Pessot, J. Squier, G. Mourou, D. Harter, Opt. Lett. 14, 797 (1989).
[CrossRef] [PubMed]

E. B. Treacy, IEEE J. Quantum Electron. 5, 454 (1969).
[CrossRef]

J. Mod. Opt. (1)

E. Popov, L. Tsonev, D. Maystre, J. Mod. Opt. 37, 367 (1990).
[CrossRef]

J. Opt. Soc. Am. A (2)

Opt. Commun. (1)

D. Strickland, G. Mourou, Opt. Commun. 56, 219 (1985);P. Maine, D. Strickland, P. Bado, M. Pessot, G. Mourou, IEEE J. Quantum Electron. 24, 398 (1988).
[CrossRef]

Opt. Lett. (6)

Other (6)

B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, M. D. Perry, “Laser damage of dielectric materials at short time scales,” Phys. Rev. Lett. (to be published).

R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980).
[CrossRef]

D. Maystre, in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1984), Vol. XXI, Chap. 1.

L. M. Hobrock, R. Withirington, H. Garvin, U.S. patent4,828,356 (May9, 1989).

M. D. Perry, J. Britten, C. Shannon, E. Shults, “Diffraction grating formed with multilayer oxide-based structures” (U.S. patentapplication filedNovember6, 1994).

M. C. Hutley, Diffraction Gratings (Academic, New York, 1982).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Basic multilayer dielectric grating concept (h, groove height, t, top-layer thickness). The dark and light layers represent materials of high (n ≈ 2) and low (n ≈ 1.5) refractive index, respectively.

Fig. 2
Fig. 2

(a) Theoretical diffraction efficiency (order m = −1) for TE-polarized light at 1053 nm of a grating consisting of alternating layers of ZnS and ThF4. (b) Expanded view of the first maxima.

Fig. 3
Fig. 3

Scanning electron micrograph of the multilayer dielectric grating structure.

Fig. 4
Fig. 4

Absolute diffraction efficiency (order m = −1, Littrow mount) for the grating shown in Fig. 3. The incident wavelength is 1053 nm. TM polarization: solid curve, open circles; TE polarization: solid curve, open squares; reflection: dotted–dashed curve, open triangles.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

sin ϑ m = sin ϑ i + m λ / d .
d = λ e 2 sin θ e cos ϕ ,

Metrics