White-light scanning fiber Michelson interferometer for absolute position–distance measurement

Abstract

A white-light fiber interferometer working in the spatial domain, using two fiber ends in a hollow tube as the sensing head and an electric magnetic actuator – mirror reflector as the path-compensation-measurement element, is presented. Analysis and preliminary experiments have demonstrated a repeatability of 0.5 μm (2σ) for position – distance measurement, and the measurement uncertainty was estimated to be 1.5 μm (2σ) over a distance range of 150 μm. Suggestions for further improving the measurement accuracy and response speed are also given.

© 1995 Optical Society of America

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