Abstract

We describe a new optical low-coherence reflectometer for depth and lateral scanning without moving parts. The reflectometer covers a range of 0.4 and 1 mm in the depth and lateral dimensions, respectively. This level was accomplished by an acousto-optic deflector for lateral scanning and temporal-coherence gating for depth resolution. The ac component of the reflected light was captured by a cooled 16-bit CCD camera with a special readout scheme. As a proof of principle, optical depths of a staggered stack of glass plates were measured.

© 1994 Optical Society of America

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References

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1993 (4)

1992 (1)

1987 (1)

1986 (1)

1985 (2)

T. H. Barnes, Appl. Opt. 24, 3702 (1985).
[CrossRef] [PubMed]

S. A. Kingsley, D. E. N. Dolfi, Electron. Lett. 21, 434 (1985).
[CrossRef]

1984 (1)

1965 (1)

G. W. Stroke, A. T. Funkhouser, Phys. Lett. 16, 272 (1965).
[CrossRef]

Barnes, T. H.

Belleville, C.

Bonner, R. F.

Chang, W.-S.

Chiang, H.-P.

Chida, K.

Das, P. K.

P. K. Das, C. M. DeCusatis, Acousto-Optic Signal Processing (Artech, Dedham, Mass., 1992), Chap. 3.

DeCusatis, C. M.

P. K. Das, C. M. DeCusatis, Acousto-Optic Signal Processing (Artech, Dedham, Mass., 1992), Chap. 3.

Dolfi, D. E. N.

S. A. Kingsley, D. E. N. Dolfi, Electron. Lett. 21, 434 (1985).
[CrossRef]

Duplain, G.

Eiju, T.

Fujimoto, J. G.

Funkhouser, A. T.

G. W. Stroke, A. T. Funkhouser, Phys. Lett. 16, 272 (1965).
[CrossRef]

Hee, M. R.

Huang, D.

Kawata, S.

Kingsley, S. A.

S. A. Kingsley, D. E. N. Dolfi, Electron. Lett. 21, 434 (1985).
[CrossRef]

Knüttel, A.

Lin, C. P.

Matsuda, K.

Minami, S.

Nada, J.

Okamoto, T.

Pulafito, C. A.

Schmitt, J. M.

Stroke, G. W.

G. W. Stroke, A. T. Funkhouser, Phys. Lett. 16, 272 (1965).
[CrossRef]

Swanson, E. A.

Takada, K.

Wang, J.

Yokohama, I.

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Figures (4)

Fig. 1.
Fig. 1.

Schematic unwrapped diagram around the reference mirror (spot R) of the stationary reflectometer. The double lines originating from VR, VS (solid lines), and VS (dashed lines) point to the center position of the interference pattern (within the acousto-optic deflector AO2), which depends on the separation l. f, Focal length; d, diameter of the collimated beam and the region in which interference occurs.

Fig. 2.
Fig. 2.

Experimental setup of the stationary reflectometer.

Fig. 3.
Fig. 3.

Upper trace: dc line scan (one line out of the middle of the masked image region) after one scan. Lower trace: ac line scan (see text).

Fig. 4.
Fig. 4.

Three 128 × 512 ac images for different lateral beam positions impinging upon a mirror directly (top), traversing a single thin glass plate (middle), or traversing two glass plates (bottom). For each lateral beam spot position (500 μm apart) the image was acquired in one scan (20-ms total exposure time).

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