Abstract

170-fs, 0.8-μJ optical pulses at 193 nm generated by frequency quadrupling of high-power Ti:sapphire laser pulses are amplified in an ArF gain module. Double-pass amplification at a 400-Hz repetition rate resulted in 290-mW average power with pulse durations of ~ 300 fs.

© 1994 Optical Society of America

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References

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1993 (3)

1992 (3)

1991 (1)

S. Szatmari, G. Almasi, P. Simon, Appl. Phys. B 53, 82 (1991).
[CrossRef]

1989 (1)

1983 (1)

1978 (1)

T. R. Loree, K. B. Butterfield, D. L. Barker, Appl. Phys. Lett. 32, 171 (1978).
[CrossRef]

Almasi, G.

S. Szatmari, G. Almasi, P. Simon, Appl. Phys. B 53, 82 (1991).
[CrossRef]

Andersson, T.

I. V. Tomov, T. Andersson, P. M. Rentzepis, Appl. Phys. Lett. 61, 1157 (1992).
[CrossRef]

Barker, D. L.

T. R. Loree, K. B. Butterfield, D. L. Barker, Appl. Phys. Lett. 32, 171 (1978).
[CrossRef]

Bon, M.

Butterfield, K. B.

T. R. Loree, K. B. Butterfield, D. L. Barker, Appl. Phys. Lett. 32, 171 (1978).
[CrossRef]

Courbon, M.

Eichmann, H.

Glownia, J. H.

Hoffmann, Th.

K. Mossavi, Th. Hoffmann, F. K. Tittel, G. Szabo, Appl. Phys. Lett. 62, 1203 (1993).
[CrossRef]

Jacobs, H.

Kaschke, M.

Kittelmann, O.

Koen, G.

Laporte, P.

Loree, T. R.

T. R. Loree, K. B. Butterfield, D. L. Barker, Appl. Phys. Lett. 32, 171 (1978).
[CrossRef]

Momma, C.

Mossavi, K.

K. Mossavi, Th. Hoffmann, F. K. Tittel, G. Szabo, Appl. Phys. Lett. 62, 1203 (1993).
[CrossRef]

Noack, F.

Rentzepis, P. M.

I. V. Tomov, T. Andersson, P. M. Rentzepis, Appl. Phys. Lett. 61, 1157 (1992).
[CrossRef]

Ringling, J.

Schäfer, F. P.

Simon, P.

S. Szatmari, G. Almasi, P. Simon, Appl. Phys. B 53, 82 (1991).
[CrossRef]

Sorokin, P. P.

Squier, J.

Subtil, J. L.

Szabo, G.

K. Mossavi, Th. Hoffmann, F. K. Tittel, G. Szabo, Appl. Phys. Lett. 62, 1203 (1993).
[CrossRef]

Szatmari, S.

S. Szatmari, G. Almasi, P. Simon, Appl. Phys. B 53, 82 (1991).
[CrossRef]

S. Szatmari, F. P. Schäfer, J. Opt. Soc. Am. B 6, 1877 (1989).
[CrossRef]

Tittel, F. K.

K. Mossavi, Th. Hoffmann, F. K. Tittel, G. Szabo, Appl. Phys. Lett. 62, 1203 (1993).
[CrossRef]

Tomov, I. V.

I. V. Tomov, T. Andersson, P. M. Rentzepis, Appl. Phys. Lett. 61, 1157 (1992).
[CrossRef]

Tünnerman, A.

Vincent, L.

Wellegehausen, B.

Welling, H.

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Figures (4)

Fig. 1
Fig. 1

Block diagram of the experimental BS, beam splitter; DM, dichroic mirror; CCM, cross-correlation measurement; PC, Pockels cell; QSW, Q switch; RGA, regenerative amplifier. Solid lines paths of the optical pulses; dotted lines, electronic connections for synchronization.

Fig. 2
Fig. 2

Average power of the amplified femtosecond pulses at 193 nm after a double pass versus the repetition rate. The absorption of air in the 1.20-m-long path to the detector was measured to be 20% and is taken into account.

Fig. 3
Fig. 3

Cross-correlation signal as function of the relative delay between the fundamental pulse and the amplified 193-nm pulse. Solid curve, calculated cross-correlation function of a 150-fs fundamental pulse and a 300-fs near-VUV pulse, taking into account group-velocity mismatch and assuming sech2-shaped pulses.

Fig. 4
Fig. 4

Spectra of the 193-nm pulses (20 shots accumulated): (a) ASE of the ArF amplifier module (the inset shows the spectrum of the seed pulses), (b) spectrum of the amplified pulses after the second pass. The spectral resolution of the optical multichannel analyzer system was 0.014 nm per channel.

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