Abstract

A method is described for modeling two-dimensional reflecting structures based on a solution of the scalar Helmholtz equation. The equation is solved by use of an alternating-direction-implicit iterative method together with a semioptimum sequence of acceleration parameters similar to those introduced decades ago for the solution of elliptic equations with positive-definite operators. The resulting technique is efficient and simple to program, permits the simulation of complex structures with modest storage requirements, and is of very general applicability.

© 1994 Optical Society of America

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