Abstract

Mo/Y multilayer mirrors were deposited by dc magnetron sputtering under different deposition conditions. They were characterized by reflectance measurements at normal and grazing angles of incidence, by transmission electron microscopy, and by Auger depth profiling. Normal-incidence peak reflectances of 34% and 22% were measured at wavelengths of 11.5 and 8.1 nm, respectively. Interface roughness and contamination of the layers during deposition limit the peak reflectance of these Mo/Y mirrors.

© 1994 Optical Society of America

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References

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  1. D. G. Stearns, R. S. Rosen, S. P. Vernon, Appl. Opt. 32, 6952 (1993).
    [CrossRef] [PubMed]
  2. C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.
  3. F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.
  4. B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
    [CrossRef]
  5. C. Montcalm, B. T. Sullivan, H. Pépin, J. A. Dobrowolski, M. Sutton, Appl. Opt. 33, 2057 (1994).
    [CrossRef] [PubMed]
  6. J. P. McCaffrey, Microsc. Res. Technol. 24, 180 (1993).
    [CrossRef]
  7. D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

1994 (1)

1993 (3)

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
[CrossRef]

J. P. McCaffrey, Microsc. Res. Technol. 24, 180 (1993).
[CrossRef]

D. G. Stearns, R. S. Rosen, S. P. Vernon, Appl. Opt. 32, 6952 (1993).
[CrossRef] [PubMed]

Alford, C.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Boom, R.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

Chaker, M.

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

Davis, J. C.

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
[CrossRef]

de Boer, F. R.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

Dobrowolski, J. A.

Falco, C. M.

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
[CrossRef]

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Henke, B. L.

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Kearney, P. A.

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

Kortright, J. B.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Makowiecki, D.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Mattens, W. C. M.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

McCaffrey, J. P.

J. P. McCaffrey, Microsc. Res. Technol. 24, 180 (1993).
[CrossRef]

Miedema, A. R.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

Montcalm, C.

C. Montcalm, B. T. Sullivan, H. Pépin, J. A. Dobrowolski, M. Sutton, Appl. Opt. 33, 2057 (1994).
[CrossRef] [PubMed]

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

Niessen, A. K.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

Pépin, H.

Rosen, R. S.

Skulina, K.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Slaughter, J. M.

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

Soufli, R.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Stearns, D. G.

Sullivan, B. T.

Sutton, M.

Underwood, J. H.

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

Vernon, S. P.

Appl. Opt. (2)

At. Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Nucl. Data Tables 54, 181 (1993).
[CrossRef]

Microsc. Res. Technol. (1)

J. P. McCaffrey, Microsc. Res. Technol. 24, 180 (1993).
[CrossRef]

Other (3)

D. Makowiecki, C. Alford, K. Skulina, J. B. Kortright, R. Soufli, E. M. Gullikson, J. H. Underwood, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper PD2.

C. Montcalm, P. A. Kearney, J. M. Slaughter, M. Chaker, C. M. Falco, in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), paper MA2.

F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, A. K. Niessen, Cohesion in Metals: Transition Metal Alloys (North-Holland, New York, 1988), p. 344.

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Figures (4)

Fig. 1
Fig. 1

Theoretical normal-incidence peak reflectances of ideal Y-based multilayer mirrors in the 5–15-nm wavelength region. The calculations for the N = 500 bilayers were based on scattering factors given by Henke et al.4

Fig. 2
Fig. 2

Reflectance of the best Mo/Y multilayer mirrors for the two different wavelength designs measured at 5° from normal incidence.

Fig. 3
Fig. 3

Low-angle XRD reflectance measurement of the Mo/Y multilayer sample A2 and the best theoretical fit. Error-function interface profiles with σerf = 0.33 nm and 0.47 nm were used to simulate the roughness of the Mo-on-Y and Y-on-Mo interfaces, respectively.

Fig. 4
Fig. 4

High-resolution transmission electron micrograph of multilayer A2. The dark and light bands correspond to the Mo and Y layers, respectively.

Tables (1)

Tables Icon

Table 1 Deposition Conditions and Characterization Results of Several Mo/Y Multilayers

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