Abstract

We report a normal-incidence grating coupler that is monolithically integrated with a GexSi1−x rib waveguide. The design, fabrication, and testing procedures are described for a 0.33-μm-period grating coupler integrated with a Ge0.04Si0.96 waveguide. Also, a theoretical analysis based on coupler-mode theory has been carried out to predict the coupling efficiency and its dependence on the angle of incidence of light. For normal incidence the measured efficiency of 6.5% was found to be in good agreement with the theoretical prediction of 6.9%. The measured FWHM of the acceptance angle about the normal was 5°, compared with the theoretical prediction of 3°.

© 1994 Optical Society of America

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