Abstract

Chirped Mo–Si multilayer coatings, where the multilayer period is systematically varied throughout the deposition process, exhibit an increased x-ray bandwidth at normal incidence with a corresponding increase in the integrated reflectance of as much as 20% at λ ~ 13 nm. The increased bandwidth is accompanied by a slight reduction in peak reflectance. The relation between the integrated and peak reflectance is used to determine the chirp required to optimize the x-ray throughput of a multiple-element optical system.

© 1993 Optical Society of America

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