Abstract

Subpicosecond pulses at 193 nm, generated by a nonresonant difference-frequency mixing process in xenon, have been amplified in an ArF excimer gain module to output energies of as much as 10 mJ. Investigations on the gain characteristics of the ArF excimer amplifier yield a saturation energy density of 1.9 mJ/cm2 and a maximum small-signal gain coefficient of 0.15 cm−1. Gain recovery measurements have been performed. A dominant gain recovery time of ~3 ns with indications of a small fast contribution in the picosecond range have been observed.

© 1993 Optical Society of America

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