Abstract

A heterodyne interferometer that uses a vibrating sample has been constructed for surface diagnostics. This interferometer provides a detailed profile of the local slope and/or roughness of a surface. A complete three-dimensional image of a surface can be obtained.

© 1993 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient

Kang Hyuk Kwon, Bong Soo Kim, and Kyuman Cho
Opt. Express 16(17) 13456-13464 (2008)

Heterodyne interferometer for absolute amplitude vibration measurements with femtometer sensitivity

Erlend Leirset, Helge E. Engan, and Astrid Aksnes
Opt. Express 21(17) 19900-19921 (2013)

Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

Youngkyu Park, Kyoung-Eop Kim, Seong-Jin Kim, June-Gyu Park, Young-Hun Joo, Bu Hyun Shin, Seung-Yop Lee, and Kyuman Cho
Opt. Lett. 36(16) 3112-3114 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription