Abstract

A 256 by 256 pixel spatial light modulator has been designed and constructed with liquid-crystal-on-silicon technology. The device is a binary electrically addressed spatial light modulator with a measured zero-order contrast ratio of 70:1 and an imaged contrast ratio of 10:1. The electronic load time is 43 μs, and the 10-to-90% switching time of the liquid crystal is 50 μs (turn-on) and 50 μs (turn-off), giving a maximum frame rate of ∼10 kHz. Its design for a specific application is described, and the first operational results are presented.

© 1993 Optical Society of America

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References

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  1. See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
    [CrossRef]
  2. B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).
  3. S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).
  4. US2, Inc., 2001 Gateway Place, East San Jose, Calif. 95110.
  5. British Drug House mixtures are available from Merck Ltd., Westquay Road, Poole BH15 1HX, UK.
  6. M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

1993 (2)

See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
[CrossRef]

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

1990 (1)

B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).

Bock, B. D.

B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).

Cotter, L. K.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

Crow, T. A.

B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).

Cunningham, J. D.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

Drabik, T.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

Ewing, T. K.

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

Gaalema, S. D.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

Giles, M. K.

B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).

Handschy, M.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

Johnson, K. M.

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
[CrossRef]

McKnight, D. J.

See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
[CrossRef]

Serati, R. A.

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

Serati, S. A.

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

Simon, D. M.

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

Underwood, I.

See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
[CrossRef]

IEEE J. Quantum Electron. (1)

See, for example,K. M. Johnson, D. J. McKnight, I. Underwood, IEEE J. Quantum Electron. 29, 699 (1993).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng. (2)

B. D. Bock, T. A. Crow, M. K. Giles, Proc. Soc. Photo-Opt. Instrum. Eng. 1347, 297 (1990).

S. A. Serati, T. K. Ewing, R. A. Serati, K. M. Johnson, D. M. Simon, Proc. Soc. Photo-Opt. Instrum. Eng. 1959, 55 (1993).

Other (3)

US2, Inc., 2001 Gateway Place, East San Jose, Calif. 95110.

British Drug House mixtures are available from Merck Ltd., Westquay Road, Poole BH15 1HX, UK.

M. Handschy, L. K. Cotter, J. D. Cunningham, T. Drabik, S. D. Gaalema, in Spatial Light Modulators and Applications, Vol. 6 of 1993 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1993), pp. 14–17.

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Figures (3)

Fig. 1
Fig. 1

Photomicrograph of the SLM displaying an image. Most of the area of the device is in the optical on state.

Fig. 2
Fig. 2

Photomicrograph of the SLM displaying a dithered image. This gives the impression of a gray-scale display. This photograph is of the device that was used for all the measurements presented in this Letter. One of the array data lines is dysfunctional in this chip.

Fig. 3
Fig. 3

Record of the oscilloscope trace showing the switch-on response of a row of pixels. The 10-to-90% rise time is ∼50 μs.

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