Abstract

An instrument for measurement of the profiles of optically rough surfaces is described. The sensor is a robust and compact Fizeau interferometer, in which one reflection is derived from the test surface. A laser-diode source and a photodetector communicate with the sensor through an optical fiber. The optical output is demodulated with a phase-stepping algorithm, achieved by frequency modulating the source. The measured horizontal resolution was 7 μm, and the noise-limited vertical resolution was 0.3nm/Hz.

© 1993 Optical Society of America

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References

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  1. J. Raja, D. J. Whitehouse, Int. J. Prod. Res. 22, 453 (1984).
    [CrossRef]
  2. R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  5. B. Bhushan, J. C. Wyant, C. L. Koliopoulos, Appl. Opt. 24, 1489 (1985).
    [CrossRef] [PubMed]
  6. C. J. R. Sheppard, H. J. Matthews, J. Mod. Opt. 35, 145 (1988).
    [CrossRef]
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    [CrossRef]
  8. D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
    [CrossRef]

1991

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

1988

C. J. R. Sheppard, H. J. Matthews, J. Mod. Opt. 35, 145 (1988).
[CrossRef]

1987

1985

1984

J. Raja, D. J. Whitehouse, Int. J. Prod. Res. 22, 453 (1984).
[CrossRef]

1982

E. Kannatey-Asibu, D. A. Dornfeld, Wear 76, 247 (1982).
[CrossRef]

1981

L. Goldberg, H. F. Taylor, J. F. Weller, Electron. Lett. 17, 497 (1981).
[CrossRef]

Anderson, D. J.

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

Barton, J. S.

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

Bhushan, B.

Borthwick, W. K D.

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

Carolan, T. A.

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

Dornfeld, D. A.

E. Kannatey-Asibu, D. A. Dornfeld, Wear 76, 247 (1982).
[CrossRef]

Eiju, T.

Goldberg, L.

L. Goldberg, H. F. Taylor, J. F. Weller, Electron. Lett. 17, 497 (1981).
[CrossRef]

Hariharan, P.

Jones, J. D. C.

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

Kannatey-Asibu, E.

E. Kannatey-Asibu, D. A. Dornfeld, Wear 76, 247 (1982).
[CrossRef]

Kidd, S. R.

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

Koliopoulos, C. L.

Matthews, H. J.

C. J. R. Sheppard, H. J. Matthews, J. Mod. Opt. 35, 145 (1988).
[CrossRef]

McBride, R.

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

Oreb, B. F.

Raja, J.

J. Raja, D. J. Whitehouse, Int. J. Prod. Res. 22, 453 (1984).
[CrossRef]

Sheppard, C. J. R.

C. J. R. Sheppard, H. J. Matthews, J. Mod. Opt. 35, 145 (1988).
[CrossRef]

Sinha, P.

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

Taylor, H. F.

L. Goldberg, H. F. Taylor, J. F. Weller, Electron. Lett. 17, 497 (1981).
[CrossRef]

Weller, J. F.

L. Goldberg, H. F. Taylor, J. F. Weller, Electron. Lett. 17, 497 (1981).
[CrossRef]

Whitehouse, D. J.

J. Raja, D. J. Whitehouse, Int. J. Prod. Res. 22, 453 (1984).
[CrossRef]

Wyant, J. C.

Appl. Opt.

Electron. Lett.

L. Goldberg, H. F. Taylor, J. F. Weller, Electron. Lett. 17, 497 (1981).
[CrossRef]

Int. J. Prod. Res.

J. Raja, D. J. Whitehouse, Int. J. Prod. Res. 22, 453 (1984).
[CrossRef]

J. Mod. Opt.

C. J. R. Sheppard, H. J. Matthews, J. Mod. Opt. 35, 145 (1988).
[CrossRef]

D. J. Anderson, J. D. C. Jones, P. Sinha, S. R. Kidd, J. S. Barton, J. Mod. Opt. 38, 2459 (1991).
[CrossRef]

Wear

E. Kannatey-Asibu, D. A. Dornfeld, Wear 76, 247 (1982).
[CrossRef]

Other

R. McBride, T. A. Carolan, J. S. Barton, W. K D. Borthwick, J. D. C. Jones, in Proceedings of Conference on Optical Fiber Sensors (Institute of Electrical and Electronics Engineers, New York, 1992), p. 346.
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Fizeau interferometer probe. GRIN, graded-index.

Fig. 2
Fig. 2

Schematic of the optical surface profile instrument.

Fig. 3
Fig. 3

Profile of the scanning-electron-microscope calibration piece obtained with the optical instrument.

Fig. 4
Fig. 4

Sample surface profile of face-milled steel block obtained (a) with the optical instrument and (b) with the Talysurf 5.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

I = I 0 [ 1 + V cos ( 4 π ν D / c ) ] ,
D = c 4 π ν tan - 1 ( I 4 - I 2 I 1 - I 3 ) ,
D m = D + ( 2 m - 1 ) c / 8 ν ,

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