Abstract

Synthetic pulse-position-modulated binary surface-relief elements with subwavelength transverse features are designed by using a combination of scalar and rigorous electromagnetic diffraction theories. Theoretically, both reflection-and transmission-type elements achieve nearly 100% diffraction efficiency at Bragg incidence. Using direct-write electron-beam lithography and reactive ion etching, we demonstrate a reflective binary Bragg-type multiple beam splitter for operation at λ = 1.064 μm.

© 1993 Optical Society of America

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