Abstract

Regions of precise measurement of surface complex optical dielectric constants are found in the presence of unknown optically thin overlayers by computer simulation of angle-of-incidence derivative ellipsometry experiments. The immersion method is considered as a tool for expanding the regions of satisfactory accuracy. The values of errors in the determination of substrate optical constants in the intervals −10 < 1 < 10 and 0 < 2 < 20 are shown.

© 1993 Optical Society of America

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