Abstract

Regions of precise measurement of surface complex optical dielectric constants are found in the presence of unknown optically thin overlayers by computer simulation of angle-of-incidence derivative ellipsometry experiments. The immersion method is considered as a tool for expanding the regions of satisfactory accuracy. The values of errors in the determination of substrate optical constants in the intervals −10 < ∊₁ < 10 and 0 < ∊₂ < 20 are shown.

© 1993 Optical Society of America

Determination of the optical constants of an inhomogeneous transparent LaF₃ thin film on a transparent substrate by spectroscopic ellipsometry

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Single-angle-of-incidence ellipsometry

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Reflection from surfaces with a thin overlayer

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Effect of a Thin Surface Film on the Ellipsometric Determination of Optical Constants*

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J. Opt. Soc. Am. 54(12) 1428-1433 (1964)