Abstract

We report what is to our knowledge the first successful attempt in prism coupling a laser beam into a lithium niobate optical waveguide grown on a thermally oxidized (100) Si substrate by magnetron rf sputtering. Bragg x-ray diffraction, Rutherford backscattering, and birefringence measurements confirm that the sputtered films were nearly stoichiometric as well as highly textured lithium niobate. The refractive indices were nTE = 2.199 ± 0.002 and nTM = 2.263 ± 0.002. The lowest propagation loss in the waveguide was determined to be 1.9 ± 0.1 dB/cm at a wavelength of 633 nm.

© 1993 Optical Society of America

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