Abstract

The optical constants of a thin inhomogeneous transparent film of LaF3 on a transparent vitreous silica substrate have been determined by spectroscopic ellipsometry. To overcome the lack of accuracy in the spectroscopic-ellipsometry measurements of transparent samples, an achromatic compensator was used with a rotating-analyzer ellipsometer. As a result, we were able to determine the depth profile of the film and also determine the refractive index of LaF3 and its dispersion in the near-UV-visible region to the third decimal place, even though the film thickness was only λ/4 (~150 nm).

© 1992 Optical Society of America

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