Abstract
Submicrometer alignment of two mask patterns on the top and the bottom surface of a thick glass substrate is possible by using optical copying. The optical copying step transfers an alignment pattern from one surface to the other by shadow casting or Fresnel propagation. In a demonstration experiment, the alignment between the two surfaces of a 3-mm-thick quartz glass substrate was achieved with a precision of 0.5–0.7 μm.
© 1992 Optical Society of America
Full Article | PDF ArticleMore Like This
Matthias Gruber, Detlev Hagedorn, and Werner Eckert
Appl. Opt. 40(28) 5052-5055 (2001)
Huihua Kenny Chiang, Richard P. Kenan, Nile F. Hartman, and Christopher J. Summers
Opt. Lett. 17(14) 1024-1025 (1992)
Amber L. Young, Jeff D. Hunker, A. R. Ellis, Sally Samora, Joel R. Wendt, Peter Maunz, and Daniel L. Stick
Appl. Opt. 53(27) 6324-6331 (2014)