Abstract

We present results that demonstrate the proof of principle of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration. A soft-x-ray laser operating at 18.2 nm was used as the x-ray source. Mo/Si multilayer mirrors with a normal-incidence reflectivity of ~20% per surface at 18.2-nm wavelength were used in the Schwarzschild objective.

© 1992 Optical Society of America

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