Abstract

A method for forming multilevel diffractive elements (kinoforms) that have highly accurate level heights so as to obtain high diffraction efficiencies is presented. The method, which leads to heterostructure multilevel binary optical elements, relies on conventional deposition technology, selective etching, and multimask lithography. As an illustration, a reflective multilevel element for 10.6-μm radiation is designed, recorded, and tested.

© 1991 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Efficient multilevel phase holograms for CO2 lasers

E. Hasman, N. Davidson, and A. A Friesem
Opt. Lett. 16(6) 423-425 (1991)

Laser smoothing of binary gratings and multilevel etched structures in fused silica

Krystian L. Wlodarczyk, Enrique Mendez, Howard J. Baker, Roy McBride, and Denis R. Hall
Appl. Opt. 49(11) 1997-2005 (2010)

Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach

M. Oliva, T. Harzendorf, D. Michaelis, U. D. Zeitner, and A. Tünnermann
Opt. Express 19(15) 14735-14745 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription