Abstract

Synthetic fused silica, exposed to high-power KrF excimer laser irradiation, shows the well-known induced absorption at 210 nm owing to E′ center generation. Time-resolved absorption spectroscopy reveals that this induced absorption is transient in nature. The generation rate of E′ centers depends strongly on the irradiation history, the OH content, and previous high-temperature processes. In order to explain the experimental observations, a nonabsorbing state of the E′ center is postulated. The recovery of the induced optical absorption in high-OH fused silica is explained as a conversion from E′ centers to these nonabsorbing centers.

© 1991 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  8. J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  14. R. A. B. Devine, J.-M. Francou, J. Appl. Phys. 66, 5654 (1989).
    [CrossRef]
  15. J. E. Shelby, J. Appl. Phys. 50, 3702 (1979).
    [CrossRef]
  16. D. L. Griscom, J. Non-Cryst. Solids 68, 1301 (1984).
    [CrossRef]
  17. E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
    [CrossRef]

1989

M. Rothschild, D. J. Ehrlich, D. C. Shaver, Appl. Phys. Lett. 55, 1276 (1989).
[CrossRef]

R. A. B. Devine, J.-M. Francou, J. Appl. Phys. 66, 5654 (1989).
[CrossRef]

1988

K. Tanimura, C. Itoh, N. Itoh, J. Phys. C 21, 1896 (1988).
[CrossRef]

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
[CrossRef]

T. E. Tsai, D. L. Griscom, E. J. Friebele, Phys. Rev. Lett. 61, 444 (1988).
[CrossRef] [PubMed]

G. L. Escher, Proc. Soc. Photo-Opt. Instrum. Eng. 998, 30 (1988).

1987

J. H. Stathis, M. A. Kastner, Phys. Rev. B 35, 2972 (1987).
[CrossRef]

1984

D. L. Griscom, J. Non-Cryst. Solids 68, 1301 (1984).
[CrossRef]

D. L. Griscom, Nucl. Instrum. Methods B 1, 481 (1984).
[CrossRef]

1983

D. L. Griscom, M. Stapelbroek, E. J. Friebele, J. Chem. Phys. 78, 1638 (1983).
[CrossRef]

1982

A. H. Edwards, W. B. Fowler, Phys. Rev. B 26, 6649 (1982).
[CrossRef]

1979

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

J. E. Shelby, J. Appl. Phys. 50, 3702 (1979).
[CrossRef]

1964

R. A. Weeks, E. Lell, J. Appl. Phys. 35, 1932 (1964).
[CrossRef]

1956

R. A. Weeks, J. Appl. Phys. 27, 1376 (1956).
[CrossRef]

Devine, R. A. B.

R. A. B. Devine, J.-M. Francou, J. Appl. Phys. 66, 5654 (1989).
[CrossRef]

Dianov, E. M.

E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
[CrossRef]

Dooryhee, E.

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

Duraud, J. P.

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

Edwards, A. H.

A. H. Edwards, W. B. Fowler, Phys. Rev. B 26, 6649 (1982).
[CrossRef]

Ehrlich, D. J.

M. Rothschild, D. J. Ehrlich, D. C. Shaver, Appl. Phys. Lett. 55, 1276 (1989).
[CrossRef]

Escher, G. L.

G. L. Escher, Proc. Soc. Photo-Opt. Instrum. Eng. 998, 30 (1988).

Fowler, W. B.

A. H. Edwards, W. B. Fowler, Phys. Rev. B 26, 6649 (1982).
[CrossRef]

Francou, J.-M.

R. A. B. Devine, J.-M. Francou, J. Appl. Phys. 66, 5654 (1989).
[CrossRef]

Friebele, E. J.

T. E. Tsai, D. L. Griscom, E. J. Friebele, Phys. Rev. Lett. 61, 444 (1988).
[CrossRef] [PubMed]

D. L. Griscom, M. Stapelbroek, E. J. Friebele, J. Chem. Phys. 78, 1638 (1983).
[CrossRef]

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

Greulich, K.-O.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Griscom, D. L.

T. E. Tsai, D. L. Griscom, E. J. Friebele, Phys. Rev. Lett. 61, 444 (1988).
[CrossRef] [PubMed]

D. L. Griscom, J. Non-Cryst. Solids 68, 1301 (1984).
[CrossRef]

D. L. Griscom, Nucl. Instrum. Methods B 1, 481 (1984).
[CrossRef]

D. L. Griscom, M. Stapelbroek, E. J. Friebele, J. Chem. Phys. 78, 1638 (1983).
[CrossRef]

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

Hitzler, H.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Itoh, C.

K. Tanimura, C. Itoh, N. Itoh, J. Phys. C 21, 1896 (1988).
[CrossRef]

Itoh, N.

K. Tanimura, C. Itoh, N. Itoh, J. Phys. C 21, 1896 (1988).
[CrossRef]

Jollet, F.

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

Kastner, M. A.

J. H. Stathis, M. A. Kastner, Phys. Rev. B 35, 2972 (1987).
[CrossRef]

Langevin, Y.

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

Leclerc, N.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Lell, E.

R. A. Weeks, E. Lell, J. Appl. Phys. 35, 1932 (1964).
[CrossRef]

Pfleiderer, C.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Rothschild, M.

M. Rothschild, D. J. Ehrlich, D. C. Shaver, Appl. Phys. Lett. 55, 1276 (1989).
[CrossRef]

Shaver, D. C.

M. Rothschild, D. J. Ehrlich, D. C. Shaver, Appl. Phys. Lett. 55, 1276 (1989).
[CrossRef]

Shelby, J. E.

J. E. Shelby, J. Appl. Phys. 50, 3702 (1979).
[CrossRef]

Sigel, G. H.

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

Sokolov, V. O.

E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
[CrossRef]

Stapelbroek, M.

D. L. Griscom, M. Stapelbroek, E. J. Friebele, J. Chem. Phys. 78, 1638 (1983).
[CrossRef]

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

Stathis, J. H.

J. H. Stathis, M. A. Kastner, Phys. Rev. B 35, 2972 (1987).
[CrossRef]

Sulimov, V. B.

E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
[CrossRef]

Takke, R.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Tanimura, K.

K. Tanimura, C. Itoh, N. Itoh, J. Phys. C 21, 1896 (1988).
[CrossRef]

Thomas, S.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Tsai, T. E.

T. E. Tsai, D. L. Griscom, E. J. Friebele, Phys. Rev. Lett. 61, 444 (1988).
[CrossRef] [PubMed]

Weeks, R. A.

R. A. Weeks, E. Lell, J. Appl. Phys. 35, 1932 (1964).
[CrossRef]

R. A. Weeks, J. Appl. Phys. 27, 1376 (1956).
[CrossRef]

Wolfrum, J.

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

Appl. Phys. Lett.

M. Rothschild, D. J. Ehrlich, D. C. Shaver, Appl. Phys. Lett. 55, 1276 (1989).
[CrossRef]

J. Appl. Phys.

R. A. Weeks, E. Lell, J. Appl. Phys. 35, 1932 (1964).
[CrossRef]

R. A. Weeks, J. Appl. Phys. 27, 1376 (1956).
[CrossRef]

R. A. B. Devine, J.-M. Francou, J. Appl. Phys. 66, 5654 (1989).
[CrossRef]

J. E. Shelby, J. Appl. Phys. 50, 3702 (1979).
[CrossRef]

J. Chem. Phys.

D. L. Griscom, M. Stapelbroek, E. J. Friebele, J. Chem. Phys. 78, 1638 (1983).
[CrossRef]

J. Non-Cryst. Solids

M. Stapelbroek, D. L. Griscom, E. J. Friebele, G. H. Sigel, J. Non-Cryst. Solids 32, 313 (1979).
[CrossRef]

D. L. Griscom, J. Non-Cryst. Solids 68, 1301 (1984).
[CrossRef]

J. Phys. C

K. Tanimura, C. Itoh, N. Itoh, J. Phys. C 21, 1896 (1988).
[CrossRef]

Nucl. Instrum. Methods B

D. L. Griscom, Nucl. Instrum. Methods B 1, 481 (1984).
[CrossRef]

J. P. Duraud, F. Jollet, Y. Langevin, E. Dooryhee, Nucl. Instrum. Methods B 32, 248 (1988).
[CrossRef]

Phys. Rev. B

A. H. Edwards, W. B. Fowler, Phys. Rev. B 26, 6649 (1982).
[CrossRef]

J. H. Stathis, M. A. Kastner, Phys. Rev. B 35, 2972 (1987).
[CrossRef]

Phys. Rev. Lett.

T. E. Tsai, D. L. Griscom, E. J. Friebele, Phys. Rev. Lett. 61, 444 (1988).
[CrossRef] [PubMed]

Phys. Status Solidi B

E. M. Dianov, V. O. Sokolov, V. B. Sulimov, Phys. Status Solidi B 147, 261 (1988).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng.

G. L. Escher, Proc. Soc. Photo-Opt. Instrum. Eng. 998, 30 (1988).

Other

N. Leclerc, C. Pfleiderer, H. Hitzler, R. Takke, S. Thomas, J. Wolfrum, K.-O. Greulich, in Conference on Lasers and Electro-Optics, Vol. 11 of 1990 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1990), paper CMG1.

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Figures (4)

Fig. 1
Fig. 1

Absorption spectra induced by KrF laser irradiation with samples S800A and S290B. The solid curve was taken a few minutes after irradiation. The open circles indicate the induced absorption of sample S800A during irradiation, normalized to the solid curve. The absolute value of the latter is much larger (see Fig. 2).

Fig. 2
Fig. 2

Induced 210-nm absorption of samples S800A, S800B, and S290B versus the number of accumulated pulses with a pulse energy of 0.5 J/cm2 and a pulse repetition rate of 200 Hz. The irregularities in the curves of samples S800A and S290B stem from 2-min breaks of the irradiation and the recovery of the samples during these breaks. Note that a negative slope represents increasing absorption in order to indicate decreasing transmission.

Fig. 3
Fig. 3

Room-temperature recovery of the 210-nm transmission after irradiation with 700,000 pulses (samples S800B and S290B) and 400,000 pulses (sample S800A).

Fig. 4
Fig. 4

The 210-nm absorption level of sample S800A as a function of the laser repetition rate. First the sample was irradiated with 400,000 pulses at 200 Hz to reach a nearly steady-state absorption, then the pulse repetition rate was stepwise decreased.

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