Abstract

The performance of an integrated master-oscillator–power-amplifier optical cavity to extract polarized, line-narrowed, tunable, and near-diffraction-limited radiation efficiently from a long-pulse wide-aperture electric discharge XeCl excimer laser is described. Pulse energies of 600 mJ with signal purity exceeding 95% have been achieved from a single laser.

© 1990 Optical Society of America

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