Abstract

We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter, and we have developed a method to extract the amplitude and phase information of the reflected signal from a sample located at the microscope object plane. An imaging theory for the interference microscope has been derived, which predicts accurately both the transverse response at a sharp edge and the range response to a perfect plane reflector.

© 1990 Optical Society of America

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  1. S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
    [CrossRef]
  2. M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).
  3. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).
  4. P. C. D. Hobbs, G. S. Kino, “Generalizing the confocal microscope via heterodyne interferometry and digital filtering,” submitted to J. Microsc.

1990 (1)

S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
[CrossRef]

1987 (1)

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Beck, P. A.

S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
[CrossRef]

Chim, S. S. C.

S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
[CrossRef]

Cohen, F.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Davidson, M.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Goodman, J. W.

J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).

Hobbs, P. C. D.

P. C. D. Hobbs, G. S. Kino, “Generalizing the confocal microscope via heterodyne interferometry and digital filtering,” submitted to J. Microsc.

Kaufman, K.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Kino, G. S.

S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
[CrossRef]

P. C. D. Hobbs, G. S. Kino, “Generalizing the confocal microscope via heterodyne interferometry and digital filtering,” submitted to J. Microsc.

Mazor, I.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Proc. Soc. Photo-Opt. Instrum. Eng. (1)

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233 (1987).

Rev. Sci. Instrum. (1)

S. S. C. Chim, P. A. Beck, G. S. Kino, Rev. Sci. Instrum. 61, 980 (1990).
[CrossRef]

Other (2)

J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).

P. C. D. Hobbs, G. S. Kino, “Generalizing the confocal microscope via heterodyne interferometry and digital filtering,” submitted to J. Microsc.

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