Abstract

Ten-level transmission phase holograms (kinoforms) manufactured in one resist layer by electron-beam lithography are reported for the first time to our knowledge. The measured hologram diffraction efficiencies were 70% for the two resist materials used. This corresponds to 82% of the maximum theoretical value for these holograms and is, to our knowledge, the highest reported to date.

© 1990 Optical Society of America

Full Article  |  PDF Article
More Like This
Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluation

H. Andersson, Mats Ekberg, Sverker Hård, Stellan Jacobsson, Michael Larsson, and T. Nilsson
Appl. Opt. 29(28) 4259-4267 (1990)

Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography

M. Ekberg, F. Nikolajeff, M. Larsson, and S. Hård
Appl. Opt. 33(1) 103-107 (1994)

Successive development optimization of resist kinoforms manufactured with direct-writing, electron-beam lithography

Michael Larsson, Mats Ekberg, Fredrik Nikolajeff, and Sverker Hård
Appl. Opt. 33(7) 1176-1179 (1994)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription