Abstract

We have fabricated hydrogenated amorphous germanium photodetectors coupled to channel waveguides in glass and lithium niobate substrates. We measured a pulse response duration of 140 psec (FWHM), which is shorter than that of any previously reported photodetectors deposited onto dielectric waveguides. The optical gap, which determines the spectral response characteristics, is approximately 1.2 eV. We have measured a photoconductive gain of 18 in phosphorus-doped detectors.

© 1990 Optical Society of America

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  1. C. Cali, V. Daneu, S. Riva-Sanseverino, in Digest of Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, D.C., 1978), paper MC3.
  2. J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
    [CrossRef]
  3. V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).
  4. M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).
  5. D. R. Larson, R. J. Phelan, Proc. Soc. Photo-Opt. Instrum. Eng. 835, 59 (1987).
  6. D. R. Larson, R. J. Phelan, Opt. Eng. 27, 503 (1988).
  7. R. K. Hickernell, D. R. Larson, R. J. Phelan, L. E. Larson, Appl. Opt. 27, 2636 (1988).
    [CrossRef] [PubMed]
  8. R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).
  9. V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
    [CrossRef]
  10. D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
    [CrossRef]

1989

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

1988

1987

D. R. Larson, R. J. Phelan, Proc. Soc. Photo-Opt. Instrum. Eng. 835, 59 (1987).

1985

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).

1983

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

1982

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

1979

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Andreev, A. A.

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

Batchman, T. E.

M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).

Cali, C.

C. Cali, V. Daneu, S. Riva-Sanseverino, in Digest of Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, D.C., 1978), paper MC3.

Carson, R. F.

M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).

Chu, V.

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

Conde, J. P.

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

Daneu, V.

C. Cali, V. Daneu, S. Riva-Sanseverino, in Digest of Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, D.C., 1978), paper MC3.

Franzen, D. L.

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

Frederick, N. V.

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

Gusev, V. A.

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

Hickernell, R. K.

Jones, D. I.

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Larson, D. R.

D. R. Larson, R. J. Phelan, Opt. Eng. 27, 503 (1988).

R. K. Hickernell, D. R. Larson, R. J. Phelan, L. E. Larson, Appl. Opt. 27, 2636 (1988).
[CrossRef] [PubMed]

D. R. Larson, R. J. Phelan, Proc. Soc. Photo-Opt. Instrum. Eng. 835, 59 (1987).

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

Larson, L. E.

Le Comber, P. G.

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Leonov, E. I.

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

Li, S.

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Martins, R.

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

McWright, M. L.

M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).

Nakajima, M.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

Phelan, R. J.

D. R. Larson, R. J. Phelan, Opt. Eng. 27, 503 (1988).

R. K. Hickernell, D. R. Larson, R. J. Phelan, L. E. Larson, Appl. Opt. 27, 2636 (1988).
[CrossRef] [PubMed]

D. R. Larson, R. J. Phelan, Proc. Soc. Photo-Opt. Instrum. Eng. 835, 59 (1987).

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

Riva-Sanseverino, S.

C. Cali, V. Daneu, S. Riva-Sanseverino, in Digest of Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, D.C., 1978), paper MC3.

Seki, Y.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

Shen, D. S.

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

Shimada, J.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

Spear, W. E.

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Terukov, E. I.

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

Wagner, S.

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

Yajima, H.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

Yumoto, J.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

Appl. Opt.

Appl. Phys. Lett.

J. Yumoto, H. Yajima, Y. Seki, J. Shimada, M. Nakajima, Appl. Phys. Lett. 40, 632 (1982).
[CrossRef]

V. Chu, J. P. Conde, D. S. Shen, S. Wagner, Appl. Phys. Lett. 55, 262 (1989).
[CrossRef]

Opt. Eng.

D. R. Larson, R. J. Phelan, Opt. Eng. 27, 503 (1988).

Philos. Mag. B

D. I. Jones, W. E. Spear, P. G. Le Comber, S. Li, R. Martins, Philos. Mag. B 39, 147 (1979).
[CrossRef]

Proc. Soc. Photo-Opt. Instrum. Eng.

R. J. Phelan, D. R. Larson, N. V. Frederick, D. L. Franzen, Proc. Soc. Photo-Opt. Instrum. Eng. 439, 207 (1983).

M. L. McWright, T. E. Batchman, R. F. Carson, Proc. Soc. Photo-Opt. Instrum. Eng. 578, 52 (1985).

D. R. Larson, R. J. Phelan, Proc. Soc. Photo-Opt. Instrum. Eng. 835, 59 (1987).

Sov. Tech. Phys. Lett.

V. A. Gusev, E. I. Terukov, E. I. Leonov, A. A. Andreev, Sov. Tech. Phys. Lett. 11, 337 (1985).

Other

C. Cali, V. Daneu, S. Riva-Sanseverino, in Digest of Meeting on Integrated and Guided-Wave Optics (Optical Society of America, Washington, D.C., 1978), paper MC3.

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Figures (5)

Fig. 1
Fig. 1

Photomicrograph of a section of a detector on a glass channel waveguide.

Fig. 2
Fig. 2

Current–voltage characteristics of a waveguide detector with guided 0.6328-μm light (the steeper trace) and without guided light. The vertical scale is 500 μA/division; the horizontal scale is 1 V/division.

Fig. 3
Fig. 3

Strip-line packaging of waveguide detectors.

Fig. 4
Fig. 4

Pulse response of a waveguide detector (200 psec per horizontal division).

Fig. 5
Fig. 5

Normal-incidence spectral responsivity.

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