Abstract

We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 μm, and has a soft-x-ray photon flux through the focus of 104–105 sec−1 when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.

© 1989 Optical Society of America

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References

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  1. J. Kirz, H. Rarback, Rev. Sci. Instrum. 56, 1 (1985).
    [CrossRef]
  2. R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.
  3. G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.
  4. H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.
  5. D. J. Nagel, C. M. Brown, M. C. Peckerar, M. L. Ginter, J. A. Robinson, T. J. McIlrath, P. K. Carroll, Appl. Opt. 23,1428 (1984).
    [CrossRef] [PubMed]
  6. J. A. Trail, R. L. Byer, Proc. Soc. Photo-Opt. Instrum. Eng. 563, 90 (1985).
  7. Zygo Corporation, Middlefield, Connecticut.
  8. T. W. Barbee, Opt. Eng. 25, 898 (1986).
  9. E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
    [CrossRef]
  10. Deposited by J. B. Kortright, Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, California.
  11. J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
    [CrossRef]
  12. H. Hogrefe, C. Kunz, Appl. Opt. 26, 2851 (1987).
    [CrossRef] [PubMed]
  13. A. E. Rosenbluth, J. M. Forsyth, AIP Conf. Proc. 75, 280 (1981).
    [CrossRef]
  14. I. N. Duling, T. Norris, T. Sizer, P. Bado, G. A. Mourou, J. Opt. Soc. Am. B 2, 616 (1985).
    [CrossRef]
  15. R. L. Byer, Science 239, 742 (1988).
    [CrossRef] [PubMed]

1988 (2)

J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
[CrossRef]

R. L. Byer, Science 239, 742 (1988).
[CrossRef] [PubMed]

1987 (1)

1986 (1)

T. W. Barbee, Opt. Eng. 25, 898 (1986).

1985 (3)

J. Kirz, H. Rarback, Rev. Sci. Instrum. 56, 1 (1985).
[CrossRef]

J. A. Trail, R. L. Byer, Proc. Soc. Photo-Opt. Instrum. Eng. 563, 90 (1985).

I. N. Duling, T. Norris, T. Sizer, P. Bado, G. A. Mourou, J. Opt. Soc. Am. B 2, 616 (1985).
[CrossRef]

1984 (1)

1981 (1)

A. E. Rosenbluth, J. M. Forsyth, AIP Conf. Proc. 75, 280 (1981).
[CrossRef]

1980 (1)

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

Ade, H.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Bado, P.

Baldini, M. G.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Barbee, T. W.

J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
[CrossRef]

T. W. Barbee, Opt. Eng. 25, 898 (1986).

Brown, C. M.

Browne, M. T.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Buckley, C. J.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Burge, R. E.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Byer, R. L.

J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
[CrossRef]

R. L. Byer, Science 239, 742 (1988).
[CrossRef] [PubMed]

J. A. Trail, R. L. Byer, Proc. Soc. Photo-Opt. Instrum. Eng. 563, 90 (1985).

Carroll, P. K.

Cave, R. C.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Charalambous, P.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Cheng, P.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Cheng, P. C.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Costa, J.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Duke, P. J.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Duling, I. N.

Feder, R.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Feng, S. C.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Forsyth, J. M.

A. E. Rosenbluth, J. M. Forsyth, AIP Conf. Proc. 75, 280 (1981).
[CrossRef]

Ginter, M. L.

Haelbich, R. P.

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

Hare, A. R.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Hills, C. P. B.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Hogrefe, H.

Jacobsen, C.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Kenney, J. M.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Kern, D.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Kim, B. K.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Kirz, J.

J. Kirz, H. Rarback, Rev. Sci. Instrum. 56, 1 (1985).
[CrossRef]

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Kortright, J. B.

Deposited by J. B. Kortright, Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, California.

Kunz, C.

Mayne-Banton, V.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

McIlrath, T. J.

McNulty, I.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Michette, A. G.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Morrison, G. R.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Mourou, G. A.

Nagel, D. J.

Norris, T.

Ogawa, K.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Peckerar, M. C.

Rarback, H.

J. Kirz, H. Rarback, Rev. Sci. Instrum. 56, 1 (1985).
[CrossRef]

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Rife, J.

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

Robinson, J. A.

Rogoyski, A. M.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Rosenbluth, A. E.

A. E. Rosenbluth, J. M. Forsyth, AIP Conf. Proc. 75, 280 (1981).
[CrossRef]

Sayre, D.

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

Segmuller, A.

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

Shu, D.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Sizer, T.

Spiller, E.

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

Taguchi, T.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

Trail, J. A.

J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
[CrossRef]

J. A. Trail, R. L. Byer, Proc. Soc. Photo-Opt. Instrum. Eng. 563, 90 (1985).

Vladimirsky, Y.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

AIP Conf. Proc. (1)

A. E. Rosenbluth, J. M. Forsyth, AIP Conf. Proc. 75, 280 (1981).
[CrossRef]

Appl. Opt. (2)

Appl. Phys. Lett. (2)

E. Spiller, A. Segmuller, J. Rife, R. P. Haelbich, Appl. Phys. Lett. 37, 1048 (1980).
[CrossRef]

J. A. Trail, R. L. Byer, T. W. Barbee, Appl. Phys. Lett. 52, 269 (1988).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Eng. (1)

T. W. Barbee, Opt. Eng. 25, 898 (1986).

Proc. Soc. Photo-Opt. Instrum. Eng. (1)

J. A. Trail, R. L. Byer, Proc. Soc. Photo-Opt. Instrum. Eng. 563, 90 (1985).

Rev. Sci. Instrum. (1)

J. Kirz, H. Rarback, Rev. Sci. Instrum. 56, 1 (1985).
[CrossRef]

Science (1)

R. L. Byer, Science 239, 742 (1988).
[CrossRef] [PubMed]

Other (5)

R. Feder, V. Mayne-Banton, D. Sayre, J. Costa, B. K. Kim, M. G. Baldini, P. C. Cheng, in X-Ray Microscopy, G. Schmahl, D. Rudolph, eds. (Springer-Verlag, Berlin, 1984), p. 279.

G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, T. Taguchi, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 201;B. Niemann, P. Guttmann, P. Hilkenbach, J. Thieme, W. Meyer-Use, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, ed. (Springer-Verlag, Berlin, 1988), p. 209.

H. Rarback, D. Shu, S. C. Feng, H. Ade, C. Jacobsen, J. Kirz, I. McNulty, Y. Vladimirsky, D. Kern, P. Cheng, in X-Ray Microscopy II, D. Sayre, M. Howells, J. Kirz, H. Rarback, eds. (Springer-Verlag, Berlin, 1988), p. 194.

Zygo Corporation, Middlefield, Connecticut.

Deposited by J. B. Kortright, Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, California.

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Figures (3)

Fig. 1
Fig. 1

Schematic of the microscope showing the major components. The dashed line indicates the extent of the vacuum (<10−5 Torr). The distance from the source to the detector is 1.4 m.

Fig. 2
Fig. 2

Razor edge scan through the x-ray focus demonstrating the 0.5-μm resolution. The step size is 0.06 μm.

Fig. 3
Fig. 3

(a) Optical microscope image of the resolution test pattern. The pattern is etched through a 100-nm freestanding gold film and consists of lines and gaps of nominal widths of 5,2, and 1 μm. Overetching has produced smaller lines and larger gaps. (b) Soft-x-ray image of the 3-μm space, 1-μm line area of a pattern nearly identical to the one in (a). The 1-μm features are clearly visible.

Tables (2)

Tables Icon

Table 1 Parameters of the Schwarzschild Objective

Tables Icon

Table 2 Contributions to the Focal Spot Diameter

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