Abstract

We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 μm, and has a soft-x-ray photon flux through the focus of 104–105 sec−1 when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.

© 1989 Optical Society of America

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