Abstract

We report fiber-optic temperature sensing with an optically thin silicon étalon. A simple fabrication technique by direct deposition of silicon onto the fiber tip, a wide range of operating wavelengths from 1500 nm down to 800 nm, and the applicability for temperature sensing well above 400°C are the most prominent features of the silicon étalon sensor.

© 1988 Optical Society of America

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References

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  1. D. A. Christensen, J. Opt. Soc. Am. 64, 1404 (1974).
  2. G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).
  3. P. Akhavan Leilabady, M. Corke, Opt. Lett. 12, 772 (1987).
    [Crossref]
  4. E. R. Cox, B. E. Jones, Proc. Inst. Electr. Eng. 221, 122 (1983).
  5. K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).
  6. G. Beheim, Electron, Lett. 22, 238 (1986).
    [Crossref]
  7. G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).
  8. J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).
  9. P. Y. Yu, M. Cardona, Phys. Rev. B 2, 3193 (1970).
    [Crossref]
  10. M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
    [Crossref]

1988 (2)

G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).

J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).

1987 (1)

1986 (1)

G. Beheim, Electron, Lett. 22, 238 (1986).
[Crossref]

1985 (1)

G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).

1983 (2)

E. R. Cox, B. E. Jones, Proc. Inst. Electr. Eng. 221, 122 (1983).

K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).

1974 (1)

D. A. Christensen, J. Opt. Soc. Am. 64, 1404 (1974).

1970 (2)

P. Y. Yu, M. Cardona, Phys. Rev. B 2, 3193 (1970).
[Crossref]

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Akhavan Leilabady, P.

Anthan, D. J.

G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).

Beheim, G.

G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).

G. Beheim, Electron, Lett. 22, 238 (1986).
[Crossref]

Boreman, G.

G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).

Brodsky, M. H.

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Cardona, M.

P. Y. Yu, M. Cardona, Phys. Rev. B 2, 3193 (1970).
[Crossref]

Christensen, D. A.

D. A. Christensen, J. Opt. Soc. Am. 64, 1404 (1974).

Coker, J. E.

K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).

Corke, M.

Cox, E. R.

E. R. Cox, B. E. Jones, Proc. Inst. Electr. Eng. 221, 122 (1983).

Fritsch, K.

G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).

Hartl, J. C.

J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).

James, K. A.

K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).

Jones, B. E.

E. R. Cox, B. E. Jones, Proc. Inst. Electr. Eng. 221, 122 (1983).

Lester, D.

G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).

Mitchell, G. L.

J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).

Petit, G. D.

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Quick, W. H.

K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).

Saaski, E. W.

J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).

Title, R. S.

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Walter, R.

G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).

Weiser, K.

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Yu, P. Y.

P. Y. Yu, M. Cardona, Phys. Rev. B 2, 3193 (1970).
[Crossref]

Electron, Lett. (1)

G. Beheim, Electron, Lett. 22, 238 (1986).
[Crossref]

J. Opt. Soc. Am. (1)

D. A. Christensen, J. Opt. Soc. Am. 64, 1404 (1974).

Opt. Lett. (1)

Phys. Rev. B (2)

P. Y. Yu, M. Cardona, Phys. Rev. B 2, 3193 (1970).
[Crossref]

M. H. Brodsky, R. S. Title, K. Weiser, G. D. Petit, Phys. Rev. B 1, 2632 (1970).
[Crossref]

Proc. Inst. Electr. Eng. (2)

E. R. Cox, B. E. Jones, Proc. Inst. Electr. Eng. 221, 122 (1983).

K. A. James, W. H. Quick, J. E. Coker, Proc. Inst. Electr. Eng. 221, 6 (1983).

Proc. Soc. Photo- Opt. Instrum. Eng. (1)

G. Boreman, R. Walter, D. Lester, Proc. Soc. Photo- Opt. Instrum. Eng. 566, 312 (1985).

Proc. Soc. Photo-Opt. Instrum. Eng. (2)

G. Beheim, K. Fritsch, D. J. Anthan, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 238 (1988).

J. C. Hartl, E. W. Saaski, G. L. Mitchell, Proc. Soc. Photo-Opt. Instrum. Eng. 838, 257 (1988).

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Figures (2)

Fig. 1
Fig. 1

Experimental (solid line) and theoretical (open circles) reflectance and transmission spectra of a silicon étalon sensor at room temperature. The inset schematically depicts the experimental arrangement.

Fig. 2
Fig. 2

Reflected intensity versus temperature of a silicon étalon sensor at a wavelength of 965 nm.

Equations (3)

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d ϕ d T = ϕ ( 1 L d L d T + 1 n d n d T ) .
1 ϕ d ϕ d T = α + n 2 - 1 2 n 2 ( - 3 α - 2 E p E p 2 - E 2 d E p d T ) ,
n 2 ( E ) = A + B E 0 2 - E 2 - i E Γ ,

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