Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

In situ monitoring technique for fabrication of high-quality diffraction gratings

Not Accessible

Your library or personal account may give you access

Abstract

We describe a simple technique that permits reproducible fabrication of high-quality diffraction gratings with short periods. This technique utilizes in situ monitoring of diffracted light from photoresist gratings during the development process and provides optimum endpoint detection for this process. The effectiveness of the technique has been demonstrated through the fabrication of a distinct grating with a 255-nm period on a GaAs substrate.

© 1988 Optical Society of America

Full Article  |  PDF Article
More Like This
High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Marcell Kiss, Teodoro Graziosi, Adrien Toros, Toralf Scharf, Christian Santschi, Olivier J. F. Martin, and Niels Quack
Opt. Express 27(21) 30371-30379 (2019)

High-quality LiTaO3 integrated-optical waveguides and devices fabricated by the annealed-proton-exchange technique

T. Findakly, P. Suchoski, and F. Leonberger
Opt. Lett. 13(9) 797-798 (1988)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved