Abstract

Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.

© 1987 Optical Society of America

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References

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  1. W. L. Bragg, A. B. Pippard, Acta Crystallogr. 6, 865 (1953);K. L. Chopra, S. K. Sharma, V. N. Yadava, Thin Solid Films 20, 279 (1974);M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, V. Vidal, Thin Solid Films 57, 173 (1979);E. Ritter, Appl. Opt. 20, 21 (1981);R. J. King, S. P. Talim, Opt. Acta 28, 1107 (1982);F. Horowitz, H. A. Macleod, Proc. Soc. Photo-Opt. Instrum. Eng. 380, 83 (1983);P. J. Martin, R. P. Netterfield, W. L. Sainty, J. Appl. Phys. 55, 235 (1984);M. Harris, M. Bowden, H. A. Macleod, Opt. Commun. 51, 29 (1984);R. P. Netterfield, W. G. Sainty, P. J. Martin, S. H. Sie, Appl. Opt. 24, 2267 (1985);H. A. Macleod, J. Vac. Sci. Technol. 4A, 418 (1986).
    [CrossRef] [PubMed]
  2. J. P. Borgogno, B. Lazarides, E. Pelletier, Appl. Opt. 21, 4020 (1982);J. P. Borgogno, F. Flory, P. Rouche, B. Schmitt, G. Albrand, E. Pelletier, H. A. Macleod, Appl. Opt. 23, 3567 (1984).
    [CrossRef] [PubMed]
  3. K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
    [CrossRef]
  4. H. Arwin, D. W. Aspnes, Thin Solid Films 113, 101 (1984).
    [CrossRef]
  5. S. J. Czyzak, W. M. Baker, R. C. Crane, J. B. Howe, J. Opt. Soc. Am. 47, 240 (1957).
    [CrossRef]
  6. D. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).
  7. D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
    [CrossRef]
  8. D. E. Aspnes, J. Vac. Sci. Technol. 3A, 1018 (1985).
  9. S. Ogura, H. A. Macleod, Thin Solid Films 37, 163 (1976);H. A. Macleod, D. Richmond, Thin Solid Films 37, 163 (1976);N. E. Holm, O. Christensen, Thin Solid Films 67, 239 (1980);S. G. Saxe, M. J. Messerly, B. Bovard, L. Desandre, F. J. VanMilligen, H. A. Macleod, Appl. Opt. 23, 3633 (1984).
    [CrossRef] [PubMed]
  10. L. W. Tilton, J. K. Taylor, J. Res. Natl. Bur. Stand. 20, 419 (1938).
  11. R. E. Stephens, I. H. Malitson, J. Res. Natl. Bur. Stand. 49, 249 (1952).
  12. P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
    [CrossRef]
  13. P. Ramanlal, L. M. Sander, Phys. Rev. Lett. 54, 1828 (1985).
    [CrossRef] [PubMed]
  14. A. G. Dirks, H. J. Leamy, Thin Solid Films 47, 219 (1977).
    [CrossRef]
  15. R. Messier, J. Vac. Sci. Technol. A4, 490 (1986);B. Yang, R. Messier, J. Appl. Phys. (to be published).
  16. R. A. Roy, R. Messier, J. Vac. Sci. Technol. A2, 312 (1984);R. A. Roy, R. Messier, Mater. Res. Soc. Symp. Proc. 38, 363 (1985).
    [CrossRef]

1986 (2)

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

R. Messier, J. Vac. Sci. Technol. A4, 490 (1986);B. Yang, R. Messier, J. Appl. Phys. (to be published).

1985 (3)

P. Ramanlal, L. M. Sander, Phys. Rev. Lett. 54, 1828 (1985).
[CrossRef] [PubMed]

D. E. Aspnes, J. Vac. Sci. Technol. 3A, 1018 (1985).

K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
[CrossRef]

1984 (2)

H. Arwin, D. W. Aspnes, Thin Solid Films 113, 101 (1984).
[CrossRef]

R. A. Roy, R. Messier, J. Vac. Sci. Technol. A2, 312 (1984);R. A. Roy, R. Messier, Mater. Res. Soc. Symp. Proc. 38, 363 (1985).
[CrossRef]

1982 (1)

1979 (1)

D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
[CrossRef]

1977 (1)

A. G. Dirks, H. J. Leamy, Thin Solid Films 47, 219 (1977).
[CrossRef]

1976 (1)

S. Ogura, H. A. Macleod, Thin Solid Films 37, 163 (1976);H. A. Macleod, D. Richmond, Thin Solid Films 37, 163 (1976);N. E. Holm, O. Christensen, Thin Solid Films 67, 239 (1980);S. G. Saxe, M. J. Messerly, B. Bovard, L. Desandre, F. J. VanMilligen, H. A. Macleod, Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

1957 (1)

1953 (1)

W. L. Bragg, A. B. Pippard, Acta Crystallogr. 6, 865 (1953);K. L. Chopra, S. K. Sharma, V. N. Yadava, Thin Solid Films 20, 279 (1974);M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, V. Vidal, Thin Solid Films 57, 173 (1979);E. Ritter, Appl. Opt. 20, 21 (1981);R. J. King, S. P. Talim, Opt. Acta 28, 1107 (1982);F. Horowitz, H. A. Macleod, Proc. Soc. Photo-Opt. Instrum. Eng. 380, 83 (1983);P. J. Martin, R. P. Netterfield, W. L. Sainty, J. Appl. Phys. 55, 235 (1984);M. Harris, M. Bowden, H. A. Macleod, Opt. Commun. 51, 29 (1984);R. P. Netterfield, W. G. Sainty, P. J. Martin, S. H. Sie, Appl. Opt. 24, 2267 (1985);H. A. Macleod, J. Vac. Sci. Technol. 4A, 418 (1986).
[CrossRef] [PubMed]

1952 (1)

R. E. Stephens, I. H. Malitson, J. Res. Natl. Bur. Stand. 49, 249 (1952).

1938 (1)

L. W. Tilton, J. K. Taylor, J. Res. Natl. Bur. Stand. 20, 419 (1938).

1935 (1)

D. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).

Arwin, H.

H. Arwin, D. W. Aspnes, Thin Solid Films 113, 101 (1984).
[CrossRef]

Aspnes, D. E.

D. E. Aspnes, J. Vac. Sci. Technol. 3A, 1018 (1985).

D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
[CrossRef]

Aspnes, D. W.

H. Arwin, D. W. Aspnes, Thin Solid Films 113, 101 (1984).
[CrossRef]

Baker, W. M.

Blanco, J. R.

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

Borgogno, J. P.

Bragg, W. L.

W. L. Bragg, A. B. Pippard, Acta Crystallogr. 6, 865 (1953);K. L. Chopra, S. K. Sharma, V. N. Yadava, Thin Solid Films 20, 279 (1974);M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, V. Vidal, Thin Solid Films 57, 173 (1979);E. Ritter, Appl. Opt. 20, 21 (1981);R. J. King, S. P. Talim, Opt. Acta 28, 1107 (1982);F. Horowitz, H. A. Macleod, Proc. Soc. Photo-Opt. Instrum. Eng. 380, 83 (1983);P. J. Martin, R. P. Netterfield, W. L. Sainty, J. Appl. Phys. 55, 235 (1984);M. Harris, M. Bowden, H. A. Macleod, Opt. Commun. 51, 29 (1984);R. P. Netterfield, W. G. Sainty, P. J. Martin, S. H. Sie, Appl. Opt. 24, 2267 (1985);H. A. Macleod, J. Vac. Sci. Technol. 4A, 418 (1986).
[CrossRef] [PubMed]

Bruggeman, D. A. G.

D. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).

Crane, R. C.

Czyzak, S. J.

Dirks, A. G.

A. G. Dirks, H. J. Leamy, Thin Solid Films 47, 219 (1977).
[CrossRef]

Hottier, F.

D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
[CrossRef]

Howe, J. B.

Lazarides, B.

Leamy, H. J.

A. G. Dirks, H. J. Leamy, Thin Solid Films 47, 219 (1977).
[CrossRef]

Macleod, H. A.

S. Ogura, H. A. Macleod, Thin Solid Films 37, 163 (1976);H. A. Macleod, D. Richmond, Thin Solid Films 37, 163 (1976);N. E. Holm, O. Christensen, Thin Solid Films 67, 239 (1980);S. G. Saxe, M. J. Messerly, B. Bovard, L. Desandre, F. J. VanMilligen, H. A. Macleod, Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

Malitson, I. H.

R. E. Stephens, I. H. Malitson, J. Res. Natl. Bur. Stand. 49, 249 (1952).

McMarr, P. J.

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
[CrossRef]

Messier, R.

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

R. Messier, J. Vac. Sci. Technol. A4, 490 (1986);B. Yang, R. Messier, J. Appl. Phys. (to be published).

R. A. Roy, R. Messier, J. Vac. Sci. Technol. A2, 312 (1984);R. A. Roy, R. Messier, Mater. Res. Soc. Symp. Proc. 38, 363 (1985).
[CrossRef]

Narayan, J.

K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
[CrossRef]

Ogura, S.

S. Ogura, H. A. Macleod, Thin Solid Films 37, 163 (1976);H. A. Macleod, D. Richmond, Thin Solid Films 37, 163 (1976);N. E. Holm, O. Christensen, Thin Solid Films 67, 239 (1980);S. G. Saxe, M. J. Messerly, B. Bovard, L. Desandre, F. J. VanMilligen, H. A. Macleod, Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

Pelletier, E.

Pilione, L.

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

Pippard, A. B.

W. L. Bragg, A. B. Pippard, Acta Crystallogr. 6, 865 (1953);K. L. Chopra, S. K. Sharma, V. N. Yadava, Thin Solid Films 20, 279 (1974);M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, V. Vidal, Thin Solid Films 57, 173 (1979);E. Ritter, Appl. Opt. 20, 21 (1981);R. J. King, S. P. Talim, Opt. Acta 28, 1107 (1982);F. Horowitz, H. A. Macleod, Proc. Soc. Photo-Opt. Instrum. Eng. 380, 83 (1983);P. J. Martin, R. P. Netterfield, W. L. Sainty, J. Appl. Phys. 55, 235 (1984);M. Harris, M. Bowden, H. A. Macleod, Opt. Commun. 51, 29 (1984);R. P. Netterfield, W. G. Sainty, P. J. Martin, S. H. Sie, Appl. Opt. 24, 2267 (1985);H. A. Macleod, J. Vac. Sci. Technol. 4A, 418 (1986).
[CrossRef] [PubMed]

Ramanlal, P.

P. Ramanlal, L. M. Sander, Phys. Rev. Lett. 54, 1828 (1985).
[CrossRef] [PubMed]

Roy, R. A.

R. A. Roy, R. Messier, J. Vac. Sci. Technol. A2, 312 (1984);R. A. Roy, R. Messier, Mater. Res. Soc. Symp. Proc. 38, 363 (1985).
[CrossRef]

Sander, L. M.

P. Ramanlal, L. M. Sander, Phys. Rev. Lett. 54, 1828 (1985).
[CrossRef] [PubMed]

Stephens, R. E.

R. E. Stephens, I. H. Malitson, J. Res. Natl. Bur. Stand. 49, 249 (1952).

Taylor, J. K.

L. W. Tilton, J. K. Taylor, J. Res. Natl. Bur. Stand. 20, 419 (1938).

Theeten, J. B.

D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
[CrossRef]

Tilton, L. W.

L. W. Tilton, J. K. Taylor, J. Res. Natl. Bur. Stand. 20, 419 (1938).

Vedam, K.

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
[CrossRef]

Acta Crystallogr. (1)

W. L. Bragg, A. B. Pippard, Acta Crystallogr. 6, 865 (1953);K. L. Chopra, S. K. Sharma, V. N. Yadava, Thin Solid Films 20, 279 (1974);M. Harris, H. A. Macleod, S. Ogura, E. Pelletier, V. Vidal, Thin Solid Films 57, 173 (1979);E. Ritter, Appl. Opt. 20, 21 (1981);R. J. King, S. P. Talim, Opt. Acta 28, 1107 (1982);F. Horowitz, H. A. Macleod, Proc. Soc. Photo-Opt. Instrum. Eng. 380, 83 (1983);P. J. Martin, R. P. Netterfield, W. L. Sainty, J. Appl. Phys. 55, 235 (1984);M. Harris, M. Bowden, H. A. Macleod, Opt. Commun. 51, 29 (1984);R. P. Netterfield, W. G. Sainty, P. J. Martin, S. H. Sie, Appl. Opt. 24, 2267 (1985);H. A. Macleod, J. Vac. Sci. Technol. 4A, 418 (1986).
[CrossRef] [PubMed]

Ann. Phys. (Leipzig) (1)

D. A. G. Bruggeman, Ann. Phys. (Leipzig) 24, 636 (1935).

Appl. Opt. (1)

Appl. Phys. Lett. (2)

K. Vedam, P. J. McMarr, J. Narayan, Appl. Phys. Lett. 47, 339 (1985);P. J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59, 694 (1986).
[CrossRef]

P. J. McMarr, J. R. Blanco, K. Vedam, R. Messier, L. Pilione, Appl. Phys. Lett. 49, 328 (1986).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Res. Natl. Bur. Stand. (2)

L. W. Tilton, J. K. Taylor, J. Res. Natl. Bur. Stand. 20, 419 (1938).

R. E. Stephens, I. H. Malitson, J. Res. Natl. Bur. Stand. 49, 249 (1952).

J. Vac. Sci. Technol. (3)

D. E. Aspnes, J. Vac. Sci. Technol. 3A, 1018 (1985).

R. Messier, J. Vac. Sci. Technol. A4, 490 (1986);B. Yang, R. Messier, J. Appl. Phys. (to be published).

R. A. Roy, R. Messier, J. Vac. Sci. Technol. A2, 312 (1984);R. A. Roy, R. Messier, Mater. Res. Soc. Symp. Proc. 38, 363 (1985).
[CrossRef]

Phys. Rev. B (1)

D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 20, 3292 (1979).
[CrossRef]

Phys. Rev. Lett. (1)

P. Ramanlal, L. M. Sander, Phys. Rev. Lett. 54, 1828 (1985).
[CrossRef] [PubMed]

Thin Solid Films (3)

A. G. Dirks, H. J. Leamy, Thin Solid Films 47, 219 (1977).
[CrossRef]

S. Ogura, H. A. Macleod, Thin Solid Films 37, 163 (1976);H. A. Macleod, D. Richmond, Thin Solid Films 37, 163 (1976);N. E. Holm, O. Christensen, Thin Solid Films 67, 239 (1980);S. G. Saxe, M. J. Messerly, B. Bovard, L. Desandre, F. J. VanMilligen, H. A. Macleod, Appl. Opt. 23, 3633 (1984).
[CrossRef] [PubMed]

H. Arwin, D. W. Aspnes, Thin Solid Films 113, 101 (1984).
[CrossRef]

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Figures (2)

Fig. 1
Fig. 1

(a) Real (1) and imaginary (2) parts of the pseudodielectric function as a function of photon energy of ZnS film on a vitreous silica substrate: dotted lines, observed data; solid lines, calculated data. (b) Schematic diagram of the model for ZnS film on a vitreous silica substrate.

Fig. 2
Fig. 2

(a) Real (1) and imaginary (2) parts of the pseudodielectric function of as a function of photon energy of MgO film on a vitreous silicate substrate: dotted lines, observed data; solid lines, calculated data. (b) Schematic diagram of the model for MgO film on a vitreous silica substrate.

Tables (1)

Tables Icon

Table 1 Best-Fit Parameters and Their 90% Confidence Limits for ZnS Film on a Vitreous Silica Substrate

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