Abstract

A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a λ/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 μm for displacement and 100 μm for distance are obtained over a range of a few meters.

© 1987 Optical Society of America

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