Abstract

A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a λ/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 μm for displacement and 100 μm for distance are obtained over a range of a few meters.

© 1987 Optical Society of America

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References

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  1. T. Yoshino, M. Nara, in Digest of Conference on Lasers and Electro-Optics (Optical Society of America, Washington, D.C., 1984), paper ThA6.
  2. M. Yonemura, Opt. Lett. 10, 1 (1985).
    [CrossRef] [PubMed]
  3. H. Kikuta, K. Iwata, R. Nagata, Appl. Opt. 25, 2976 (1986).
    [CrossRef] [PubMed]
  4. G. Beheim, K. Fritsch, Appl. Opt. 25, 1439 (1986).
    [CrossRef] [PubMed]
  5. T. Kubota, T. Yoshino, T. Ose, Opt. Lett. 9, 31 (1984).
    [CrossRef] [PubMed]

1986 (2)

1985 (1)

1984 (1)

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Figures (6)

Fig. 1
Fig. 1

Schematic diagram of the interferometer for measuring displacement and distance.

Fig. 2
Fig. 2

Principle of measurement of FM radar system.

Fig. 3
Fig. 3

Oscilloscope traces of the interference fringes. Mirror M is moved (a) to the right and (b) the left.

Fig. 4
Fig. 4

Lissajous's figure of the interference fringes.

Fig. 5
Fig. 5

Typical sample of the beat signal. fm = 90 Hz, ΔIpp = 15 mA, and D = 6 cm.

Fig. 6
Fig. 6

Fringe number N versus optical path difference D.

Equations (2)

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D = [ c / 4 χ Δ I p p f m ] f m ,
Δ D = c Δ N / 2 Δ f p p ,

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