Abstract

We give experimental results for amplitude and phase modulation by free-carrier injection in planar and rib waveguides at a wavelength of 10.6 μm. These waveguides have been formed by metal-organic chemical-vapor deposition of InP and GaInAs layers on InP substrates. Absorptions of 95% associated with phase shifts greater than 3π have been measured for injection-current densities below 1 A/cm2 with a planar guiding structure and drive currents of approximately 10 mA for typical channel waveguides.

© 1987 Optical Society of America

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