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Depth response of confocal optical microscopes

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Abstract

The on-axis intensity response of a confocal scanning optical microscope was measured for an objective of numerical aperture 0.9. The data compare favorably with theoretical calculations obtained by numerical integration of the standard theory, provided that lens aberrations are taken into account. The invariance of the shape of the central lobe to surface roughness and tilt is also demonstrated.

© 1986 Optical Society of America

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